In TG-FTIR, gases evolved by volatilization or thermal decomposition are qualitatively analyzed, which allows you to track changes in the generated amount along with the temperature change.
The new, next generation benchtop total reflection X-ray fluorescence (TXRF) spectrometer
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers