Rigaku Products

Rigaku's Product Lines

Explore science and achieve engineering excellence with Rigaku, your partner for over 70 years in empowering new perspectives with X‑ray analysis and inspection equipment.

Semiconductor metrology solutions

Semiconductors have the power to change the world for the better. At Rigaku, we strive to make this a reality as the leading global supplier of X-ray metrology tools for semiconductor process R&D and high-volume manufacturing.

TXRF series
TXRF series

Rigaku's TXRF series excels in semiconductor manufacturing and R&D, detecting surface contamination with high sensitivity to trace elements. Integrated Vapor-Phase Decomposition (VPD) ensures low detection limits for precise quantitative analysis of thin films, enhancing quality control.

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WDXRF series
WDXRF series

WDXRF series, renowned for precise measurement of material thickness and composition, especially with light elements, are vital in semiconductor manufacturing and R&D for ensuring high-performance device creation. Rigaku solutions include AZX 400 and WaferX 310.

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Hybrid metrology tools

XRR, EDXRF, XRD, and optical techniques typically for characterizing multilayer samples for BEOL and packaging applications, as well as the characterization of ultrathin, multilayer samples, unpatterned and/or patterned wafers.

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Crystallography is a powerful scientific technique used to determine the three-dimensional structure of crystalline materials at the atomic level.

X-ray diffraction

Three-dimensional atomic structures of small molecules and proteins may be unambiguously determined by single crystal X-ray diffraction.

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XtaLAB Synergy-ED (1200)
Electron diffraction

Electron diffraction provides researchers with the ability to perform single crystal diffraction on samples smaller than those at the limit of X-ray diffraction.

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Reagent stock 1200x627

Crystallization reagents and stock solutions are available in convenient screens and as custom products.

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X-ray diffraction & scattering

X-ray diffraction and scattering can study the crystalline and amorphous materials at the atomic level as well as the nanometer-scale morphologies of any solid materials.

X-ray diffraction (XRD)

XRD is commonly used to identify and refine powder and polycrystalline materials. You can also quantify crystalline phases or study polycrystalline and epitaxial thin film structures, crystalline quality, and preferred orientation.

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Small-angle X-ray scattering (SAXS)

SAXS is sensitive to the size, shape, and arrangement of nanoscale structures within the material and is widely used to study nanomaterials and protein

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Stress analysis

X-ray residual stress analysis is one of the few nondestructive techniques to measure stress in solid materials. It is widely used in the automobile industry.

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XRF spectrometers

XRF is widely used in various industries, including mining, petroleum, metallurgy, environmental science, and archaeology, for qualitative and quantitative elemental analysis of a wide range of materials.

Wavelength dispersive XRF (WDXRF)

Wavelength dispersive X-ray fluorescence (WDXRF) is a technique that has become indispensable when fast, accurate elemental analysis is needed.

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Energy dispersive XRF (EDXRF)

Energy dispersive X-ray fluorescence (EDXRF) spectroscopy provides one of the simplest, most accurate and most economic analytical methods for the determination of the chemical composition of many types of materials.

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Total Reflection XRF (TXRF)

Total reflection X-ray fluorescence spectroscopy (TXRF) is a powerful analytical technique used for the elemental analysis of samples with very low concentrations of trace elements.

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Imaging & nondestructive testing

Nondestructive imaging is used for inspection, analysis, and quality control without altering the sample's integrity. You can also use high-resolution 3D imaging with X-ray CT for materials and life science research.

X-ray computed tomography (CT)

X-ray CT can analyze the internal structures of materials and objects non-destructively at micron to submicron resolution. Rigaku's CT scanners are easy to use and widely implemented in research facilities and failure analysis laboratories.

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Non-destructive testing (NDT)

X-ray imaging is one of the most widely used techniques for nondestructive foreign object detection. Rigaku provides portable NDT instruments for heavy-duty radiographic operation in the field and floor-standing models for inspection of shoes, apparel, food, etc.

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MILabs 1200x627
Molecular imaging

MILabs - a Rigaku company - offers versatile preclinical small animal imaging platforms in the field. You can combine multiple modalities, including PET, SPECT, Optical 2D, 3D or 4D CT. These modalities are upgradable to scale your preclinical research.

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Thermal analysis

Thermal analysis encompasses a suite of scientific techniques used to investigate the physical and chemical properties of materials as a function of temperature.

Thermal analysis

Thermal analysis techniques are widely used across various scientific disciplines, including materials science, chemistry, pharmaceuticals, and polymer science, to understand thermal behavior, stability, and processing of materials.

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Evolved gas analysis

EGA is an analytical technique in which the characteristics or amount of volatile products released by a substance are determined as a function of controlled temperature variation. EGA is typically used to determine thermal stability, decomposition mechanisms, the nature of residual solvents and product safety.

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Handheld Raman

Rigaku's handheld Raman analyzer portfolio offers detection, identification and verification of materials - where you need it most.

CQL Max-ID Identifies Novichok 1200x627

Maximizes chemical threat analysis, with the largest on-board library to identify over 13,000 items including narcotics, explosives, toxic chemical industrial chemicals, chemical warfare agents (CWAs), and more.

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Rigaku CQL Narc-ID Identifies Fentanyl 1200x627

Presumptive identification of narcotics, precursor chemicals, and cutting agents.

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Progeny Handheld Raman Amber Bottle 1200x627

Versatile, handheld spectrometer for raw material identification and verification.

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Rigaku offers a comprehensive range of components for X-ray analytical instrumentation, catering to various research, industrial, and academic needs.

X-ray sources

Rigaku produces microfocus rotating anode and sealed tube X-ray sources for various analytical techniques, including X-ray diffraction, X-ray fluorescence, and small-angle X-ray scattering.

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X-ray optics

Rigaku offers a range of optics designed to focus X-ray beams and other radiation sources for optimal performance in analytical instruments.

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X-ray detectors

Rigaku manufactures high-resolution X-ray detectors, including semiconductor-based detectors, such as silicon drift detectors or silicon strip detectors, gas-filled proportional counters, and scintillation detectors.

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Process control

Rigaku offers process control instruments that perform online elemental analysis by EDXRF or X-ray transmission.

Process control

EDXRF technology is used for process elemental analysis for liquid stream and fixed position web or coil applications. X-ray transmission technology is used for sulfur measurement of crude, bunker fuel, fuel oils, and other highly viscous hydrocarbons.

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