XRTmicron Lab
X-ray topography imaging system
For non-destructive evaluation of single-crystalline materials
Rigaku XRTmicron is a fast, high-resolution laboratory X-ray topography system for non-destructive crystal defect imaging. Various types of dislocations, micropipes, stacking faults, small angle grain boundaries, and non-uniformity within single crystal wafers (such as Si, SiC, GaN, InP, GaAs, AlN, Ga₂O₃, sapphire, and more) can be imaged across wafers up to 300 mm in diameter.


XRTmicron Lab Overview
The XRTmicron Lab is designed for scientists conducting fundamental research in crystal growth and epitaxial layer formation. By providing high-resolution, non-destructive X-ray topography, it enables researchers to study the underlying physics of crystallographic defects and explore the mechanisms that govern material quality.
This system supports manual sample handling, from coupons to 300 mm wafers, with flexible configuration, aligns with the needs of laboratory environments, allowing scientists to design experiments, validate growth processes, and investigate defect formation at the earliest stages.
With the XRTmicron Lab, researchers can push the boundaries of material science, gaining insights that not only advance academic knowledge and material discovery but also lay the groundwork for new applications in power electronics, optoelectronics, and beyond.
XRTmicron Lab Features
XRTmicron Lab Specifications
Technique | X-ray topograph imaging | |
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Purpose | Non-destructive evaluation of single-crystalline materials | |
Technology | Switch between transmission and reflection topography | |
Key components | High-brightness micro X-ray source; specialized X-ray mirror optics; high-resolution, high-sensitivity X-ray camera | |
Options | HR-XTOP camera, Crystal collimator, Defect inspection done with XRT Toolbox Software | |
Wafer transfer / Sample handling | Manual handling |
XRTmicron Lab Resources
Webinars
Investigating Crystalline Defects of Semiconductors Using X-ray Topography | Watch the Recording |
Non-Destructive Dislocation Characterization in SiC Substrates Using XRTmicron Technology | Watch the Recording |
Rigaku Journal articles
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Publications
XRTmicron Lab Events
Learn more about our products at these events
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EventDatesLocationEvent website
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EMRS Fall meeting 2025September 14 2025 - September 17 2025Warsaw, Poland
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International Conference on Silicon Carbide and Related Materials (ICSCRM 2025)September 15 2025 - September 18 2025Busan, Korea
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SEMICON JapanDecember 1 2025 - December 2 2025Tokyo, Japan

Contact Us
Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.