Rigaku’s Magnetic Fluid Vacuum Rotary Feedthroughs
High-Performance Rotational Seal Solutions with Vacuum and Magnetic Seal Technologies
The origin of Rigaku’s magnetic fluid feedthroughs dates back to 1952 when Rigaku first commercialized a rotating anode X-ray generator.Although originally built as in-house units, Rigaku Mechatronics was newly established in 1989 as a manufacturer of magnetic fluid feedthrough units based on the technologies accumulated by that time.
Our products have been widely adopted as clean shaft bearings to address various challenges faced by customers who prioritize reliability above all. Magnetic Fluid Vacuum Rotary Feedthrough units are recognized as optimal solutions for introducing rotational motion into vacuum or differential pressure environments, and are gaining attention as high-performance vacuum feedthrough technology.
Compared to conventional general-purpose seals such as oil seals, magnetic fluid feedthroughs offer superior sealing performance and are widely used in vacuum systems for semiconductor and FDP industries as rotational seal units for vacuum seal applications. Additionally, magnetic seal technology using magnetic fluid enables non-contact sealing, helping to reduce wear and particle generation, and contributing to the maintenance of clean vacuum environments.
As we belong to the Rigaku Group specialized in X-ray analysis instruments, we are located within the premises of Rigaku. We can provide a proposal one step ahead of others, through heat analysis simulations, magnetic fluid analyses, quantitative assessments, identification assessments, etc., by fully utilizing our analytical know-how accumulated in the development and manufacturing of analysis instruments. Also, the Rigaku X-ray analysis instruments equipped with our magnetic fluid seals have been widely used around the world and have earned the trust of our customers.
Advantages of selecting Rigaku’s magnetic fluid feedthroughs
We are a team specialized in magnetic fluid feedthroughs within the Rigaku Group, working with semiconductor industries for 30 years.
History
With over 30 years of dedicated experience, we are a long-established manufacturer specializing in the development and production of magnetic fluid feedthroughs. Our deep expertise and technical know-how, cultivated over three decades, enable us to deliver solutions that consistently outperform industry standards.Our magnetic fluid feedthrough technology—particularly for vacuum seal applications—has earned widespread recognition from customers who demand exceptional reliability and performance. These innovations have played a vital role in overcoming complex technical challenges across various industries.We are committed to continuous improvement. Through ongoing research and development, we strive to advance our technologies and further enhance our vacuum sealing capabilities to meet the evolving needs of our customers.
Special-order products
Many of our products are custom-engineered magnetic fluid feedthrough units, designed based on detailed specifications and dedicated drawings tailored to each customer’s unique requirements. Guided by our philosophy of “product development in close partnership with our customers,” we respond flexibly to a wide range of needs—from single-unit prototyping to full-scale mass production—with a customer-first mindset and a strong sense of ownership.Our magnetic seal technology, especially for vacuum sealing applications, has earned the trust of clients operating in demanding environments where exceptional reliability and precision are essential.We continuously ask ourselves: “How can we deliver truly valuable vacuum seal solutions that exceed expectations in quality, cost, and delivery?” With this commitment, we pursue ongoing research and development to refine our technologies and elevate our vacuum sealing capabilities to meet the evolving needs of our customers.
Thorough quality control
Rigaku’s magnetic fluid feedthroughs have evolved in parallel with the advancement of the semiconductor industry. In semiconductor manufacturing, where ultra-clean environments are essential, vacuum seal components must meet the highest standards of quality and reliability.At Rigaku, we view magnetic fluid feedthroughs not merely as parts, but as precision sealing mechanisms built on advanced magnetic seal technology. To eliminate contamination risks, we implement rigorous quality control measures—including thorough pre-process and post-process cleaning of individual components.These efforts ensure that our seals are optimized for clean vacuum environments and meet the stringent demands of cutting-edge semiconductor applications.
What is a magnetic fluid feedthrough?
Magnetic force and magnetic fluid form a liquid-type O ring.
A magnetic fluid seal, due to its characteristics of long service life, contamination-less, high vacuum performance / high pressure resistance, and high speed rotation, has higher performance than other general-purpose seals such as oil seals, and they have been mainly used as a rotary seal unit in a vacuum system for semiconductors and FDP industries.
Long service life
No contact between the rotary shaft and solid parts, no wear from friction
Contamination-less
Liquid is used for the sealing material, so no particles will be generated from friction during rotation.
High vacuum performance / high pressure resistance
Creating a magnetic circuit fixes the magnetic fluid into an o ring, providing a powerful sealing performance.
High-speed rotation
As the seal is formed with liquid, little torque is lost and high-speed rotation is enabled.
Product information
Standard products
Rigaku’s magnetic fluid seals are offered in 12 series, with a lineup of 72 models.
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Custom-made products
In addition to the standard products, we can manufacture special order products according to your request from one unit.
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Repair / overhaul
We accept your request for repair / overhaul of your magnetic fluid seals made by Rigaku.
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Contact Us
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