Rigaku logo
Semiconductor
RSMD Service & Support banner

Protect Your Investment. Maximize Uptime.

Rigaku Semiconductor Metrology Service & Support Programs

Your Rigaku metrology system is a critical part of your process control strategy. Ensure peak performance, maximize system availability, and reduce unplanned downtime with a Rigaku Service Contract tailored to your operational needs.

Whether you are renewing an existing agreement, upgrading your current coverage, or expanding support across additional systems, Rigaku offers flexible service solutions designed specifically for semiconductor manufacturing environments.

Supported tool series

TXRF Series
TXRF series
Learn more >
WDXRF Series
WDXRF series
Learn more >
ONYX SERIES
ONYX series
Learn more >
XTRAIA MF SERIES
XTRAIA MF series
Learn more >
XTRAIA XD SERIES
XTRAIA XD series
Learn more >
XTRAIA CD SERIES
XTRAIA CD series
Learn more >
X-ray Topography Systems
XRTmicron and XTRAIA XT Series
Learn more >
TFXRD and XTRAIA TF Series
TFXRD Series
Learn more >

Why maintain an active service contract?

Increase system availability

Minimize downtime with priority access to Rigaku's factory-trained service engineers and technical support teams.

Control operating costs

Reduce unexpected repair expenses through predictable service coverage and discounted replacement parts.

Preserve measurement performance

Maintain factory specifications and measurement accuracy through preventive maintenance and certified service procedures.

Extend equipment life

Protect your capital investment with proactive maintenance and genuine Rigaku replacement components.

Service contract options

Labor only

Ideal for customers seeking professional maintenance support while managing replacement part purchases independently.

Benefits Include:

  • • On-site labor coverage
  • • Travel and expenses included
  • • 5% discount on replacement parts
  • • Priority service scheduling

Parts only

Designed for organizations with internal maintenance resources requiring coverage for replacement components.

Benefits Include:

  • • Replacement part coverage
  • • 5% discount on labor services
  • • Reduced repair costs
  • • Extended warranty protection on covered parts

Standard

Our most popular support program, combining labor coverage with travel and preventive maintenance services.

Benefits Include:

  • • Comprehensive labor coverage
  • • Travel and expenses included
  • • Preventive maintenance services
  • • 10% discount on consumable parts
  • • Priority response support

Premium

Maximum protection with comprehensive coverage for labor, replacement parts, and consumables.

 

Benefits Include:

  • • Labor coverage
  • • Replacement parts included
  • • Consumables included
  • • Travel and expenses included
  • • Lowest total cost of ownership
  • • Maximum uptime protection

Upgrade your current coverage

Moving from Labor Only or Parts Only to Standard or Premium coverage can significantly reduce operational risk and simplify maintenance budgeting.

Upgrade benefits

  • Expanded service coverage
  • Reduced emergency repair costs
  • Faster recovery from unexpected failures
  • Improved budget predictability
  • Enhanced equipment reliability

Update My Coverage

Add coverage for additional systems

Many semiconductor facilities operate multiple Rigaku systems across process control, crystal growth, contamination monitoring, and advanced packaging applications. Ask about expanding service coverage to include:

  • XRTmicron systems
  • XTRAIA platforms
  • TXRF systems
  • ONYX packaging inspection systems
  • WaferX solutions

Get a Multisystem Support Quote

Renew before your contract expires

Avoid gaps in coverage and maintain uninterrupted access to Rigaku service resources.

Renewal advantages

  • Continuous technical support
  • Ongoing preventive maintenance
  • Priority service response
  • Coverage for eligible replacement parts
  • Reduced risk of unexpected repair costs

Renew My Service Contract

Contact Rigaku service

Ready to renew, upgrade, or expand your service coverage?

Contact your Rigaku Service Representative today to review your installed systems and identify the best support program for your operation.

Keep your metrology systems operating at peak performance with Rigaku Service & Support.

Talk to a Service Specialist

Request a Service Contract review

✓ Contract Renewal Review

✓ Coverage Upgrade Assessment

✓ Multi-System Service Planning

✓ Preventive Maintenance Evaluation

✓ Total Cost of Ownership Analysis

Contact Us

Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.

Contact Sales
Contact Service
Office Locations