XTRAIA TF Series
Fab-ready XRD metrology for thin films
High-resolution, non-destructive full-wafer characterization for thin film manufacturing
The XTRAIA TF Series is Rigaku’s production-ready X-ray diffraction (XRD) platform for thin film process control in high-volume semiconductor fabs. Purpose-built for 200 mm and 300 mm wafer lines, the system provides non-destructive, high-throughput mapping of thin film properties, including crystallinity, lattice strain, stress/relaxation, thickness, and interface quality.
Available models:
- XTRAIA TF-2000: Supports wafers up to 200 mm
- XTRAIA TF-3000: Supports wafers up to 300 mm
XTRAIA TF Series Overview
Designed for power electronics, RF devices, and advanced logic, the XTRAIA TF Series helps fabs monitor deposition uniformity, assess crystallographic orientation, and control multilayer heterostructures with exceptional precision. By combining HRXRD, XRR, and reciprocal space mapping (RSM) on a single platform, it delivers in-line yield assurance without requiring wafer cleaving or destructive analysis.
Engineered for 24/7 reliability, the XTRAIA TF integrates seamlessly with fab automation (SECS/GEM), ensuring stability, repeatability, and maximum throughput in demanding production environments.
The XTRAIA TF Series empowers fabs to eliminate process drift, qualify new materials, and protect yield across advanced device manufacturing. With high-speed diffraction mapping and robust wafer automation, it offers the precision of R&D instrumentation and the throughput of fab-ready metrology.
Key benefits include:
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Applications:
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XTRAIA TF Series Features
XTRAIA TF Series Specifications
| Technique | X-ray diffraction (XRD), HRXRD, and XRR with full-wafer mapping | |
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| Wafer sizes | 200 mm (TF-2000), 300 mm (TF-3000) | |
| Measurement items | Thickness, density, roughness, crystallinity, strain, relaxation, defects | |
| Detectors | HyPix-3000/400 high-speed 2D detector (optional HRXRD camera) | |
| Throughput | High-speed full-wafer mapping in minimal cycle times | |
| Automation | Wafer handling, recipe-driven workflows, in-line SPC reporting | |
| Connectivity | SECS/GEM/GEM300 compliant for fab integration | |
| Non-destructive | Direct measurement on in-process wafers, no cleaving required | |
| Reliability | 24/7 uptime, robust components, stable performance | |
XTRAIA TF Series Events
Learn more about our products at these events
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EventDatesLocationEvent website
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Rigaku Taiwan professional training courses (XRD)January 23 2026 - January 23 2026Rigaku Taiwan (RTC-TW)
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Rigaku School for Practical CrystallographyJanuary 26 2026 - February 6 2026
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SEMICON Korea 2026February 11 2026 - February 13 2026COEX, South Korea
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SPIE Advanced Lithography + PatterningFebruary 22 2026 - February 26 2026San Jose, CA, USA
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Florida Semiconductor SummitFebruary 23 2026 - February 25 2026Orlando, FL, USA
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Rigaku Taiwan professional training courses (SCX)February 26 2026 - February 26 2026Rigaku Taiwan (RTC-TW)
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Applied Physics Society Autumn NagoyaMarch 15 2026 - March 16 2026Tokyo, Japan
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The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum SponsorsMarch 16 2026 - March 19 2026Monterey, CA ,USA
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SEMICON China 2026March 25 2026 - March 27 2026SNIEC, Shanghai, China
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Rigaku Taiwan professional training courses (XRD)March 27 2026 - March 27 2026Rigaku Taiwan (RTC-TW)
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CS International 2026April 20 2026 - April 22 2026Brussels, Belgium
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SEMICON SEA 2026May 5 2026 - May 7 2026Kuala Lumpur, Malaysia
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ASMC – Advanced Semiconductor Manufacturing ConferenceMay 11 2026 - May 14 2026Albany, NY, USA
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The 2026 IEEE 76th Electronic Components and Technology ConferenceMay 26 2026 - May 29 2026Orlando, Fl, USA
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CEIA Leti Innovation DaysJune 23 2026 - June 25 2026Maison Minatec, Grenoble, France
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The International Workshop on Gallium Oxide and Related Materials (IWGO-6)August 2 2026 - August 7 2026College Park, MD, USA.
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SEMICON Taiwan 2026September 2 2026 - September 4 2026Taipei, Taiwan
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ICSCRM Japan 2026 (Silver Sponsor)September 27 2026 - October 2 2026Yokohama, Japan
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SEMICON West 2026October 13 2026 - October 15 2026San Francisco, CA, USA
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SEMICON EuropaNovember 10 2026 - November 13 2026Munich, Germany
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SEMICON Japan 2026December 9 2026 - December 11 2026Tokyo, Japan
XTRAIA TF Series
Contact Us
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