1. XTRAIA MF-3400
The new standard for thin film metrology for the next-generation devices
We will unveil the XTRAIA MF-3400, the newest model in the globally adopted XTRAIA MF Series, with more than 250 units installed across logic, memory, and WFE fabs.
The XTRAIA MF-3400 integrates next-generation X-ray sources and optics developed through Rigaku’s long-term R&D, delivering improved capability and reduced measurement time. The system provides approximately twice the X-ray intensity with the same spot size and cuts measurement time by about half. It also achieves higher precision for angstrom-level film control.
Visitors can explore a full-scale 3D AR experience that allows you to look inside the system and visualize X-ray paths and wafer irradiation.
2. XHEMIS TX-3000
Next-generation TXRF for ultra-high-speed surface analysis
The XHEMIS TX-3000 delivers significant performance improvements in metal contamination mapping through newly developed X-ray optics, a multi-element detector, and AI-based spectral prediction.
Measurement time is reduced from one hour to about 10 minutes, representing up to six times faster performance.
A tri-wavelength X-ray source enables the detection of light elements that have traditionally been difficult for XRF, including sodium, magnesium, and aluminum, supporting advanced contamination control in modern fabs.
3. ONYX 3200
Dual source ultra-micro area film thickness and composition metrology
The ONYX 3200 is the newest addition to the ONYX series. It is an inline, non-destructive platform that combines dual X-ray sources, micro focus EDXRF, integrated 2D optical microscopy, and a 3D confocal scanner.
It enables precise composition and shape measurement of ultra-thin film features and is ideal for BEOL, bump structures, and advanced packaging process control.
TFXRD series
Rigaku's TFXRD and XTRAIA TF series offer unparalleled precision and versatility for any thin film application.
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X-ray topographic imaging systems
Lab to Fab: From research and development to quality control. Supporting every step of semiconductor manufacturing; high-resolution, non-destructive wafer defect imaging
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FSAS III
Automatic X-ray single crystal orientation measurement device FSAS III. Accurately conveys the cutting orientation of single crystal materials to wire saws and other cutting machines
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SmartLab
This fully automated multipurpose X-ray diffraction instrument has a guidance function that tells you the optimal conditions.
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Magnetic fluid seal units
Magnetic fluid seal units are an ideal way to introduce rotational motion into vacuum or high-pressure environments.
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Contact Us
Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.