XTRAIA XD-3300
In-line HRXRD and XRR Metrology Tool
The XTRAIA XD-3300 is a versatile X-ray metrology tool enabling non-destructive analysis of single- and multilayer films on blanket and patterned 300 mm and 200 mm wafers with high throughput in high-volume manufacturing.
Measurements results include film thickness, density, and roughness (by X-ray reflectometry, XRR) and epitaxial film thickness, composition, strain, lattice relaxation, and crystal structure quality (by high-resolution XRD, HRXRD).
XTRAIA XD-3300 Overview
Supports a variety of applications, including in-line XRD/XRR multilayer stacked films, metal thin films, piezoelectric thin films, SiGe, and compound semiconductor film thickness and composition analysis, allowing you to select the optimal equipment configuration depending on the application.
XTRAIA XD-3300 Features
XTRAIA XD-3300 Specifications
| Technique | High-resolution X-ray diffraction (HRXRD), X-ray reflectometry (XRR) | |
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| Benefit | For blanket/patterned epitaxial thin films. Dual-beam (line and micro-spot) Pattern recognition |
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| X-ray source | Source 1: 9 kW Cu rotating anode or 2.2 kW Cu sealed tube Source 2: COLORS hybrid Cu beam module for patterned wafer measurements |
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| Attributes | Blanket and patterned wafer metrology X-ray optics: Max. 2 monochromators from Ge(400)x2, Ge(220)x2, Ge(220)x4 X-ray detector: 2D (HyPix-3000) Small spot size, pattern recognition, high intensity, and chi axis Highly accurate goniometer |
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| Features | High-intensity rotating anode and micro-spot beam COLORS Hybrid Cu |
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| Options | Monochromators Variety of optical components GEM300 software, E84/OHT support |
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| Dimensions | 1656(W) x 3689(D) x 2289(H) mm | |
| Measurement results | HRXRD, XRR, Rocking curve, and RSM | |
XTRAIA XD-3300 Events
Learn more about our products at these events
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EventDatesLocationEvent website
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Rigaku Taiwan professional training courses (XRD)January 23 2026 - January 23 2026Rigaku Taiwan (RTC-TW)
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Rigaku School for Practical CrystallographyJanuary 26 2026 - February 6 2026
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SEMICON Korea 2026February 11 2026 - February 13 2026COEX, South Korea
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SPIE Advanced Lithography + PatterningFebruary 22 2026 - February 26 2026San Jose, CA, USA
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Florida Semiconductor SummitFebruary 23 2026 - February 25 2026Orlando, FL, USA
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Rigaku Taiwan professional training courses (SCX)February 26 2026 - February 26 2026Rigaku Taiwan (RTC-TW)
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Applied Physics Society Autumn NagoyaMarch 15 2026 - March 16 2026Tokyo, Japan
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The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum SponsorsMarch 16 2026 - March 19 2026Monterey, CA ,USA
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SEMICON China 2026March 25 2026 - March 27 2026SNIEC, Shanghai, China
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Rigaku Taiwan professional training courses (XRD)March 27 2026 - March 27 2026Rigaku Taiwan (RTC-TW)
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CS International 2026April 20 2026 - April 22 2026Brussels, Belgium
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SEMICON SEA 2026May 5 2026 - May 7 2026Kuala Lumpur, Malaysia
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ASMC – Advanced Semiconductor Manufacturing ConferenceMay 11 2026 - May 14 2026Albany, NY, USA
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The 2026 IEEE 76th Electronic Components and Technology ConferenceMay 26 2026 - May 29 2026Orlando, Fl, USA
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CEIA Leti Innovation DaysJune 23 2026 - June 25 2026Maison Minatec, Grenoble, France
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The International Workshop on Gallium Oxide and Related Materials (IWGO-6)August 2 2026 - August 7 2026College Park, MD, USA.
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SEMICON Taiwan 2026September 2 2026 - September 4 2026Taipei, Taiwan
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ICSCRM Japan 2026 (Silver Sponsor)September 27 2026 - October 2 2026Yokohama, Japan
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SEMICON West 2026October 13 2026 - October 15 2026San Francisco, CA, USA
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SEMICON EuropaNovember 10 2026 - November 13 2026Munich, Germany
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SEMICON Japan 2026December 9 2026 - December 11 2026Tokyo, Japan
XTRAIA XD-3300
Contact Us
Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.