XTRAIA XD-2000-R
Non-destructive X-ray reflectometry metrology tool for multilayer films, EUV masks, and advanced thin-film applications
- Characterizes multilayer thickness and density
- Sub-nanometer precision for surface/interface roughness
- Automated and non-destructive workflow
- Designed for semiconductor and photomask applications
The XTRAIA XD-2000-R is a precision metrology system that employs X-ray reflectometry (XRR) to measure thin-film properties with exceptional accuracy. It is purpose-built for evaluating multilayer structures in EUV masks and advanced thin films used in semiconductor manufacturing. The tool offers sub-nanometer resolution and supports sample mapping over a large area.
Fully automated and equipped with advanced optical components, the XD-2000-R delivers fast, reliable results for quality assurance and process development environments.
XTRAIA XD-2000-R Overview
The XTRAIA XD-2000-R is a high-precision metrology system designed for advanced X-ray reflectometry (XRR) measurements. It offers unmatched accuracy in film thickness, density, and surface/interface roughness analysis. It is specifically engineered for semiconductor and EUV mask applications and is ideal for multilayer film characterization in environments demanding high throughput and detailed analysis.
XTRAIA XD-2000-R Features
XTRAIA XD-2000-R Specifications
| Technique | High-resolution X-ray reflectometry (HRXRR) | |
|---|---|---|
| Sensitivity | Sub-nanometer scale | |
| Sample compatibility | EUV masks, SMIF-compatible formats | |
| Measurement items | Film thickness, density, interface roughness | |
| Resolution | Sub-nanometer vertical resolution | |
| Benefit | Accurate multilayer and interface characterization | |
| Automation | Fully automated with recipe setup | |
| Technology | Goniometer with HyPix detector and multilayer optics | |
| Compliance | GEM300, SEMI S2/S8, CE, NFPA, EU directives | |
| Throughput | Approx. 15 minutes per measurement point | |
| Core attributes | Non-destructive analysis, advanced data interpretation | |
| Core features | Precise film metrology, roughness profiling | |
| Options | Multi-angle XRR, extended mask handling, advanced software | |
| Measurement results | Reflectometry profiles, thickness, roughness, density | |
XTRAIA XD-2000-R Options
- Multi-angle reflectometry
- Custom detectors
- Environmental control modules
- Extended mask support
The following accessories are available for this product:
XTRAIA XD-2000-R Events
Learn more about our products at these events
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EventDatesLocationEvent website
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SPIE Advanced Lithography + PatterningFebruary 22 2026 - February 26 2026San Jose, CA, USA
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Florida Semiconductor SummitFebruary 23 2026 - February 25 2026Orlando, FL, USA
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Rigaku Taiwan professional training courses (SCX)February 26 2026 - February 26 2026Rigaku Taiwan (RTC-TW)
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JSAP Spring Meeting 2026March 15 2026 - March 16 2026Tokyo, Japan
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The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum SponsorsMarch 16 2026 - March 19 2026Monterey, CA ,USA
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SEMICON China 2026March 25 2026 - March 27 2026SNIEC, Shanghai, China
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Rigaku Taiwan professional training courses (XRD)March 27 2026 - March 27 2026Rigaku Taiwan (RTC-TW)
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CS International 2026April 20 2026 - April 22 2026Brussels, Belgium
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SEMICON SEA 2026May 5 2026 - May 7 2026Kuala Lumpur, Malaysia
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ASMC – Advanced Semiconductor Manufacturing ConferenceMay 11 2026 - May 14 2026Albany, NY, USA
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WOCSDICE/EXMATEC 2026May 24 2026 - May 28 2026Gdańsk, Poland
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The 2026 IEEE 76th Electronic Components and Technology ConferenceMay 26 2026 - May 29 2026Orlando, Fl, USA
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CEIA Leti Innovation DaysJune 23 2026 - June 25 2026Maison Minatec, Grenoble, France
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The International Workshop on Gallium Oxide and Related Materials (IWGO-6)August 2 2026 - August 7 2026College Park, MD, USA.
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SEMICON Taiwan 2026September 2 2026 - September 4 2026Taipei, Taiwan
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ICSCRM Japan 2026 (Silver Sponsor)September 27 2026 - October 2 2026Yokohama, Japan
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SEMICON West 2026October 13 2026 - October 15 2026San Francisco, CA, USA
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SEMICON EuropaNovember 10 2026 - November 13 2026Munich, Germany
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SEMICON Japan 2026December 9 2026 - December 11 2026Tokyo, Japan
XTRAIA XD-2000-R
Contact Us
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