XTRAIA MF-3400
Fourth generation high-speed, high-precision X-ray metrology
Multifunctional XRR / XRD / XRF metrology system for thin-film analysis and process control for patterned wafer up to 300 mm
The XTRAIA MF-3400 introduces the fourth generation (Gen 4) of Rigaku’s multifunctional thin-film metrology platform, combining XRR, XRD, and XRF technologies in a single high-throughput, high-precision system.
Designed for demanding semiconductor environments, the MF-3400 delivers superior measurement speed, accuracy, and uptime, driven by innovations in X-ray source intensity, robotic precision, and automated system control.
Its newly developed high-intensity Cu tube provides twice the XRF intensity for improved sensitivity, while the real-time monitored robotic arm achieves unprecedented repeatability. Together with advanced software and fault-tolerant mechanical systems, the MF-3400 ensures robust, repeatable results for high-volume production lines.
XTRAIA MF-3400 Overview
The XTRAIA MF-3400 is engineered for thin-film metrology across XRR, XRD, and XRF modes. It provides high-precision measurement of layer thickness, density, and composition, with faster analysis cycles for semiconductor wafer characterization.
This new system builds on the proven strengths of the previous generation, now featuring an X-ray source with nearly double the intensity and a redesigned transfer mechanism for faster, more precise handling. Advanced automation functions, such as search-less autofocus, real-time transfer-arm position control, and automatic FOUP door closing, ensure seamless operation, reduced downtime, and exceptional stability in cleanroom environments.
- Over 40 % faster throughput than the previous generation.
- Repeatability improved from ±0.1 mm → ±0.04 mm
- Dual-intensity Cu X-ray tube – 2× higher XRF intensity
- Search-less autofocus and real-time position monitoring
- FOUP door close & fault-tolerant FFU for reliability
XTRAIA MF-3400 Features
Maintaining the proven functional advantages of the MF-3000 series, now enhanced with the following new features:
XTRAIA MF-3400 Specifications
| Technique | X-ray reflectivity (XRR), X-ray diffraction (XRD), and X-ray fluorescence (XRF) | |
|---|---|---|
| Detector type | HyPix 3000 for XRR/XRD • SDD for XRF | |
| X-ray source | High-power Cu tube (Gen 4) – 2× higher intensity vs. previous generation | |
| Repeatability | ±0.04 mm (Improved from ±0.1 mm) | |
| Sample compatibility | Semiconductor wafers (≤ 200 mm and 300 mm configurations) | |
XTRAIA MF-3400 Options
- Alternative X-ray tube configurations for application flexibility
- Multilayer analysis software packages (extended FP module)
- Cleanroom integration kits and robotic interfaces
The following accessories are available for this product:
XTRAIA MF-3400 Events
Learn more about our products at these events
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EventDatesLocationEvent website
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Rigaku Taiwan professional training courses (XRD)January 23 2026 - January 23 2026Rigaku Taiwan (RTC-TW)
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Rigaku School for Practical CrystallographyJanuary 26 2026 - February 6 2026
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SEMICON Korea 2026February 11 2026 - February 13 2026COEX, South Korea
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SPIE Advanced Lithography + PatterningFebruary 22 2026 - February 26 2026San Jose, CA, USA
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Florida Semiconductor SummitFebruary 23 2026 - February 25 2026Orlando, FL, USA
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Rigaku Taiwan professional training courses (SCX)February 26 2026 - February 26 2026Rigaku Taiwan (RTC-TW)
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Applied Physics Society Autumn NagoyaMarch 15 2026 - March 16 2026Tokyo, Japan
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The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum SponsorsMarch 16 2026 - March 19 2026Monterey, CA ,USA
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SEMICON China 2026March 25 2026 - March 27 2026SNIEC, Shanghai, China
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Rigaku Taiwan professional training courses (XRD)March 27 2026 - March 27 2026Rigaku Taiwan (RTC-TW)
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CS International 2026April 20 2026 - April 22 2026Brussels, Belgium
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SEMICON SEA 2026May 5 2026 - May 7 2026Kuala Lumpur, Malaysia
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ASMC – Advanced Semiconductor Manufacturing ConferenceMay 11 2026 - May 14 2026Albany, NY, USA
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The 2026 IEEE 76th Electronic Components and Technology ConferenceMay 26 2026 - May 29 2026Orlando, Fl, USA
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CEIA Leti Innovation DaysJune 23 2026 - June 25 2026Maison Minatec, Grenoble, France
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The International Workshop on Gallium Oxide and Related Materials (IWGO-6)August 2 2026 - August 7 2026College Park, MD, USA.
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SEMICON Taiwan 2026September 2 2026 - September 4 2026Taipei, Taiwan
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ICSCRM Japan 2026 (Silver Sponsor)September 27 2026 - October 2 2026Yokohama, Japan
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SEMICON West 2026October 13 2026 - October 15 2026San Francisco, CA, USA
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SEMICON EuropaNovember 10 2026 - November 13 2026Munich, Germany
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SEMICON Japan 2026December 9 2026 - December 11 2026Tokyo, Japan
XTRAIA MF-3400
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