XHEMIS EX-2000
XRR and EDXRF Metrology Tool for Blanket Wafers
Thickness, density, roughness, and composition of films on blanket wafers
In-line high-volume semiconductor manufacturing
This versatile X-ray metrology tool uses X-ray fluorescence (EDXRF) and X-ray reflectivity (XRR) for high-throughput non-destructive measurement of thickness and density of blanket wafers ranging from ultrathin single-layer films to multilayer stacks for process development and film quality control.
XHEMIS EX-2000 Overview
Designed for high-volume manufacturing
XHEMIS EX-2000 is designed for high-volume manufacturing of up to 200 mm wafers. Outstanding stage alignment before measurement enables quick and accurate measurement of a variety of wafer samples. The highly accurate stage control enables full-surface mapping measurements in a short time.
User-friendly designed tool
When equipped with a transfer robot, XHEMIS EX-2000 can handle wafers automatically. AutoCal (an automatic calibration function) maintains constant tool conditions. User-friendly software makes tool operation and data analysis easy. This tool can be used for a variety of applications from research to production for quality control.
Application examples
Barrier metal, Al/W wire, W process, backside electrode, oxide/nitride films, LED, filters, power devices, MEMS
XHEMIS EX-2000 Features
XHEMIS EX-2000 Specifications
| Technique | X-ray reflectometry (XRR), energy-dispersive X-ray fluorescence (EDXRF) | |
|---|---|---|
| Benefit | Measure ultra-thin single-layer films to multi-layer stacks. Obtain film thickness, density, and roughness by XRR (without standards) Obtain thickness / composition by XRF (with standards) |
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| Technology | XRR and small-spot XRF | |
| Attributes | Blanket wafer metrology Cu sealed-tube source for XRR; Cr sealed-tube source for XRF EDXRF spot size ~ 2 mm diameter |
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| Features | XYθ sample stage Auto loader |
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| Options | Pd sealed-tube source for XRF (optimal for Al) SECS/GEM software |
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| Dimensions | 1250 (W) x 1825 (H) x 2400 (D) mm (with auto loader) | |
| Measurement results | EDXRF: Film thickness and composition XRR: Film thickness, density, and roughness |
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