XRR, EDXRF & Optical Tools

XRR (X-ray reflectometry): Provides thickness, density, and roughness information for single layers or complex multilayer film stacks.

EDXRF (Energy dispersive X-ray fluorescence): An elemental analysis technique for film thickness and composition.

Optical methods: Techniques utilizing visible light to inspect / characterize 2D and 3D structures.

Hybrid metrology: Combining micro-spot EDXRF, 2D optical microscopy, and 3D confocal optical scanning for In-line, non-destructive inspection and metrology.  This combination of complementary techniques is well-suited for back-end-of-line (BEOL) and packaging applications.