TFXRD-300

X-ray diffraction analysis (XRD) system for up to 300 mm wafer full mapping

The TFXRD-300 is a dedicated XRD tool designed for the measurement of thin films on large-diameter wafers and measures the film thickness, the crystal quality, the composition ratio of the compound material, and relaxation of the epitaxial wafers, etc.

TFXRD 300-200 TFXRD-300-secondary

TFXRD-300 Overview

High-precision goniometer with selectable optics

 XRD System for all thin film XRD applications and XY movable stage for mapping up to 300 mm wafers.

The system guarantees that your samples will remain intact, ensuring you can conduct further experimentation and analysis without any issues. Trust us to provide the most precise and reliable results for all your research and development needs.

XRD system mapping tool for Near-fab applications

Improve materials analysis, enhanced quality control, and optimized manufacturing processes.

Thin films

  • Precise thickness and composition
  • Crystallographic information
  • Stress and strain analysis
  • Non-destructive characterization
  • Multilayer analysis
  • Advanced material development

Specialized for XRR thickness

Determine the thickness, density, and interface roughness of thin films, coatings, and multilayer structures. 

GaAs (004), cubic GaN (002), hexagonal GaN (0004) specialized evaluation

Precise analysis of the crystallographic orientations and control the growth and processing of materials to achieve desired performance in electronic and optoelectronic devices.

TFXRD-300 Features

Highest precision goniometer with selectable optics for all thin film XRD applications and XY-movable stage for mapping
Efficient measurement speed
Incident monochromator for high-resolution measurements
Large wafer full mapping
For up to 300 mm wafers

TFXRD-300 Specifications

Technique X-ray diffraction (XRD), rocking curve (XRC) and reflectometry (XRR)
Benefit High-precision goniometer with full mapping XY-stage for large wafers (200 mm, 300 mm)
Technology High-precision θ-2θ horizontal goniometer with large cradle
Attributes Up to 300 mm wafer full mapping XY stage
Options PhotonMax high-flux 9 kW rotating anode X-ray source
Confocal Max-flux 800 W rotating anode X-ray source
HyPix-3000 high energy resolution 2D HPAD detector
Computer External PC, MS Windows OS, SmartLab Studio II software
Dimensions Approx. 1900 (W) x 2200 (H) x 1900 (D) mm
Mass Approx. 1600 kg
Power requirements 3Ø, 200 V 50/60 Hz, 30 A (sealed tube) or 60 A (9 kW rotating anode)

TFXRD-300 Events

Learn more about our products at these events

  • SEMICON SEA
    May 19 2025 - May 21 2025
    Singapore
  • EMRS Spring Meeting 2025
    May 25 2025 - May 29 2025
    Strasbourg, France
  • Leti Innovation Days 2025
    June 24 2025 - June 26 2025
    Grenoble, France
  • SOFC-XIX
    July 12 2025 - July 17 2025
    Stockholm, Sweden
  • JSAP Autumn EXPO
    September 6 2025 - September 9 2025
    Nagoya, Japan
  • The 86th JSAP Autumn Meeting 2025
    September 6 2025 - September 9 2025
    Tokyo, Japan
  • SEMICON Taiwan
    September 9 2025 - September 11 2025
    Taipei, Taiwan
  • EMRS Fall meeting 2025
    September 14 2025 - September 17 2025
    Warsaw, Poland
  • International Conference on Silicon Carbide and Related Materials (ICSCRM 2025) 
    September 15 2025 - September 18 2025
    Busan, Korea
  • SEMICON Japan
    December 1 2025 - December 2 2025
    Tokyo, Japan

Contact Us

Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.