TFXRD-300
X-ray diffraction analysis (XRD) system for up to 300 mm wafer full mapping
The TFXRD-300 is a dedicated XRD tool designed for the measurement of thin films on large-diameter wafers and measures the film thickness, the crystal quality, the composition ratio of the compound material, and relaxation of the epitaxial wafers, etc.


TFXRD-300 Overview
High-precision goniometer with selectable optics
XRD System for all thin film XRD applications and XY movable stage for mapping up to 300 mm wafers.
The system guarantees that your samples will remain intact, ensuring you can conduct further experimentation and analysis without any issues. Trust us to provide the most precise and reliable results for all your research and development needs.
XRD system mapping tool for Near-fab applications
Improve materials analysis, enhanced quality control, and optimized manufacturing processes.
Thin films
- Precise thickness and composition
- Crystallographic information
- Stress and strain analysis
- Non-destructive characterization
- Multilayer analysis
- Advanced material development
Specialized for XRR thickness
Determine the thickness, density, and interface roughness of thin films, coatings, and multilayer structures.
GaAs (004), cubic GaN (002), hexagonal GaN (0004) specialized evaluation
Precise analysis of the crystallographic orientations and control the growth and processing of materials to achieve desired performance in electronic and optoelectronic devices.
TFXRD-300 Features
TFXRD-300 Specifications
Technique | X-ray diffraction (XRD), rocking curve (XRC) and reflectometry (XRR) | |
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Benefit | High-precision goniometer with full mapping XY-stage for large wafers (200 mm, 300 mm) | |
Technology | High-precision θ-2θ horizontal goniometer with large cradle | |
Attributes | Up to 300 mm wafer full mapping XY stage | |
Options | PhotonMax high-flux 9 kW rotating anode X-ray source Confocal Max-flux 800 W rotating anode X-ray source HyPix-3000 high energy resolution 2D HPAD detector |
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Computer | External PC, MS Windows OS, SmartLab Studio II software | |
Dimensions | Approx. 1900 (W) x 2200 (H) x 1900 (D) mm | |
Mass | Approx. 1600 kg | |
Power requirements | 3Ø, 200 V 50/60 Hz, 30 A (sealed tube) or 60 A (9 kW rotating anode) |
TFXRD-300 Events
Learn more about our products at these events
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EventDatesLocationEvent website
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SEMICON SEAMay 19 2025 - May 21 2025Singapore
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EMRS Spring Meeting 2025May 25 2025 - May 29 2025Strasbourg, France
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Leti Innovation Days 2025June 24 2025 - June 26 2025Grenoble, France
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SOFC-XIXJuly 12 2025 - July 17 2025Stockholm, Sweden
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JSAP Autumn EXPOSeptember 6 2025 - September 9 2025Nagoya, Japan
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The 86th JSAP Autumn Meeting 2025September 6 2025 - September 9 2025Tokyo, Japan
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SEMICON TaiwanSeptember 9 2025 - September 11 2025Taipei, Taiwan
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EMRS Fall meeting 2025September 14 2025 - September 17 2025Warsaw, Poland
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International Conference on Silicon Carbide and Related Materials (ICSCRM 2025)September 15 2025 - September 18 2025Busan, Korea
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SEMICON JapanDecember 1 2025 - December 2 2025Tokyo, Japan

Contact Us
Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.