TFXRD Lab

High-precision thin film XRD for advanced research

The Rigaku TFXRD Lab delivers lab-grade precision for the non-destructive analysis of thin films, multilayers, and coatings. Designed for materials research laboratories working on thin films, multilayers, and coatings for next-generation electronic and photonic devices, this system features a high-precision goniometer with selectable optics and an XY-movable stage for mapping wafers up to 300 mm in diameter. With high-resolution measurements, flexible configuration, and exceptional sample integrity, the TFXRD Lab empowers scientists and engineers to accelerate materials discovery, optimize growth processes, and enhance device performance.

Available models:

  • TFXRD Lab 200: Supports wafers up to 200 mm
  • TFXRD Lab 300: Supports wafers up to 300 mm

TFXRD 300-200

TFXRD Lab Overview

High-precision goniometer with selectable optics

 XRD System for all thin film XRD applications and XY movable stage for mapping up to 300 mm wafers.

The system guarantees that your samples will remain intact, ensuring you can conduct further experimentation and analysis without any issues. Trust us to provide the most precise and reliable results for all your research and development needs.

XRD system mapping tool for Near-fab applications

Improve materials analysis, enhanced quality control, and optimized manufacturing processes.

Thin films

  • Precise thickness and composition
  • Crystallographic information
  • Stress and strain analysis
  • Non-destructive characterization
  • Multilayer analysis
  • Advanced material development

Specialized for XRR thickness

Determine the thickness, density, and interface roughness of thin films, coatings, and multilayer structures. 

GaAs (004), cubic GaN (002), hexagonal GaN (0004) specialized evaluation

Precise analysis of the crystallographic orientations and control the growth and processing of materials to achieve desired performance in electronic and optoelectronic devices.

TFXRD Lab Features

High-precision goniometer with selectable optics for all thin film XRD applications​
XY-movable stage enabling high-resolution mapping across the entire wafer surface​
Efficient measurement speed to accelerate research and development workflows
Incident beam monochromator for ultra-high-resolution measurements​
Large wafer compatibility supports full-area mapping of wafers up to 300 mm

TFXRD Lab Specifications

Technique High-resolution thin film X-ray diffraction (HR-XRD) and X-ray reflectivity (XRR)
Purpose Non-destructive structural analysis of thin films, multilayers, and coatings for R&D applications
Technology High-precision θ-2θ goniometer with selectable optics and XY-movable stage for wafer mapping
Key components High-brilliance X-ray source; precision XRD optics; high-resolution 2D detector; enclosed cabinet
Options XRR module, automated mapping software, specialized analysis packages (GaAs, GaN, etc.)
Wafer transfer / Sample handling Manual wafer loading with XY stage (supports up to 300 mm wafers)

TFXRD Lab Events

Learn more about our products at these events

  • Rigaku Taiwan professional training courses (XRD)
    January 23 2026 - January 23 2026
    Rigaku Taiwan (RTC-TW)
  • Rigaku School for Practical Crystallography
    January 26 2026 - February 6 2026
  • SEMICON Korea 2026
    February 11 2026 - February 13 2026
    COEX, South Korea
  • SPIE Advanced Lithography + Patterning
    February 22 2026 - February 26 2026
    San Jose, CA, USA 
  • Florida Semiconductor Summit
    February 23 2026 - February 25 2026
    Orlando, FL, USA
  • Rigaku Taiwan professional training courses (SCX)
    February 26 2026 - February 26 2026
    Rigaku Taiwan (RTC-TW)
  • Applied Physics Society Autumn Nagoya
    March 15 2026 - March 16 2026
    Tokyo, Japan
  • The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum Sponsors
    March 16 2026 - March 19 2026
     Monterey, CA ,USA
  • SEMICON China 2026
    March 25 2026 - March 27 2026
    SNIEC, Shanghai, China
  • Rigaku Taiwan professional training courses (XRD)
    March 27 2026 - March 27 2026
    Rigaku Taiwan (RTC-TW)
  • CS International 2026
    April 20 2026 - April 22 2026
    Brussels, Belgium
  • SEMICON SEA 2026
    May 5 2026 - May 7 2026
    Kuala Lumpur, Malaysia
  • ASMC – Advanced Semiconductor Manufacturing Conference
    May 11 2026 - May 14 2026
    Albany, NY, USA
  • The 2026 IEEE 76th Electronic Components and Technology Conference
    May 26 2026 - May 29 2026
    Orlando, Fl, USA
  • CEIA Leti Innovation Days
    June 23 2026 - June 25 2026
    Maison Minatec, Grenoble, France 
  • The International Workshop on Gallium Oxide and Related Materials (IWGO-6)
    August 2 2026 - August 7 2026
     College Park, MD, USA.
  • SEMICON Taiwan 2026
    September 2 2026 - September 4 2026
    Taipei, Taiwan
  • ICSCRM Japan 2026 (Silver Sponsor)
    September 27 2026 - October 2 2026
    Yokohama, Japan
  • SEMICON West 2026
    October 13 2026 - October 15 2026
    San Francisco, CA, USA 
  • SEMICON Europa
    November 10 2026 - November 13 2026
    Munich, Germany
  • SEMICON Japan 2026
    December 9 2026 - December 11 2026
    Tokyo, Japan

Contact Us

Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.