X-ray metrology solutions from lab to fab

Semiconductors have the power to change the world for the better. Rigaku strives to make this a reality as the leading global supplier of X-ray metrology tools for semiconductor process R&D and high-volume manufacturing.

Rigaku is a leading manufacturer of X-ray technology-based instruments that solve manufacturing challenges in semiconductor R&D and production. With over 70 years of global market leadership, our advanced families of products provide solutions for everything from in-fab process control metrology to R&D for thin film and materials characterization.

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Ensure the quality and reliability of your semiconductor manufacturing processes

Our semiconductor X-ray metrology tools are designed to provide the most advanced and reliable solutions for both semiconductor R&D and high-volume manufacturing. We use cutting-edge technologies such as TXRF, WDXRF, EDXRF, XRR, HRXRD, and CDSAXS to ensure the highest quality and accuracy in your measurements. Our X-ray diffraction (XRD), X-ray fluorescence (XRF), X-ray reflectometry (XRR), and X-ray topography (XRT) metrology tools measure critical process parameters like thin film thickness, composition, roughness, density, porosity, and crystal structure defects. We also offer process total reflection X-ray fluorescence (TXRF) and vapor phase decomposition-total reflection X-ray fluorescence (VPD-TXRF) tools for contamination measurement.

With global 24/7 service and support, Rigaku delivers cutting-edge solutions for yield enhancement and process development. Choose Rigaku and stay ahead of the competition with our unparalleled metrology solutions.

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