ONYX Series
Hybrid energy dispersive X-ray fluorescence and optical techniques
Typically for characterization of multilayered samples for BEOL and packaging applications. It combines micro-spot EDXRF, 2D microscope, and 3D scanner for in-line, non-destructive inspection and metrology. Rigaku metrology solutions: ONYX 3000 and ONYX 3200.
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XTRAIA MF Series
EDXRF (Energy dispersive X-ray fluorescence), XRR (X-ray reflectivity), and XRD (X-ray diffraction)
The combination of X-ray techniques supports a wide range of applications typically for the characterization of ultrathin, multilayer samples, blanket, and patterned wafers. Rigaku metrology solutions: XTRAIA MF-2000 and XTRAIA MF-3000
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XTRAIA XD Series
HRXRD (High-resolution X-ray diffraction) and XRR
Strain, composition, and thickness of epitaxial layers, crystalline phase, and texture of polycrystalline films. Thin film and film stack thicknesses and density. Rigaku metrology solutions: XTRAIA XD-3200 and XTRAIA XD-3300.
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XTRAIA CD Series
CDSAXS: X-ray CD metrology tools for grazing incidence and transmission measurements for up to 300 mm
GISAXS for in-line small angle scattering for shallow CD measurements (XTRAIA CD-3200G). TSAXS for in0line small angle X-ray scattering for high aspect device CD measurements (XTRAIA CD-3200T).
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