Bump Inspection - Composition & Height

The hybrid solution provides a quick and reliable location of bump and wafer defects. The bump, a dome-like structure made of solderable material, is a crucial interconnecting element for connecting chips in a three-dimensional stack and for connecting the stack to the printed circuit board.

• Elemental composition analysis by optical analysis for geometrical parameters and XRF
• Vertical incident X-ray beam (spot down to 7 µm on Sn K line) using four independent detectors configured in a symmetric assembly
• Thickness/composition extraction using robust Fundamental Parameters (FP) algorithm
• Composition analysis using Standardless Fundamental Parameter (SLFP) option