XTRAIA CD-3010G
Grazing Incidence X-ray CD Metrology Tool
GISAXS for CD measurements, XRR for thickness, density, and roughness.
For up to 300 mm wafers.
XTRAIA CD-3010G Specifications
| Technique | Small-angle X-ray scattering - grazing-incidence mode (GISAXS) X-ray reflectometry (XRR) |
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|---|---|---|
| Benefits | Critical dimension measurements of shallow, repeating structures | |
| X-ray source | Sealed tube, Cu Ka (8.04 KeV) | |
| X-ray optics | Multilayer mirror optics | |
| X-ray detector | 2D detector | |
| Attributes | Patterned wafer metrology For periodic fine 3D shape For line & space, dot or hole structures Shallow hole/pillar, resist, mask pattern, cell area of memory devices, FinFET/GAA |
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| Features | Patterned recognition and full-wafer mapping | |
| Options | GEM300 software, E84/OHT support | |
| Dimensions | 1865(W) × 3700(D) × 2115(H) mm, 2965 kg (with load port) | |
| Measurement targets | GISAXS: Pitch, CD, height, SWA (side wall angle), RT (round top), RB (round bottom), line width distribution, pitch distribution, height distribution XRR: Thickness, density, and roughness. |
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