XRTmicron Lab
X-ray topography imaging system
For non-destructive evaluation of single-crystalline materials
Rigaku XRTmicron is a fast, high-resolution laboratory X-ray topography system for non-destructive crystal defect imaging. Various types of dislocations, micropipes, stacking faults, small angle grain boundaries, and non-uniformity within single crystal wafers (such as Si, SiC, GaN, InP, GaAs, AlN, Ga₂O₃, sapphire, and more) can be imaged across wafers up to 300 mm in diameter.


XRTmicron Lab Overview
The XRTmicron Lab is designed for scientists conducting fundamental research in crystal growth and epitaxial layer formation. By providing high-resolution, non-destructive X-ray topography, it enables researchers to study the underlying physics of crystallographic defects and explore the mechanisms that govern material quality.
This system supports manual sample handling, from coupons to 300 mm wafers, with flexible configuration, aligns with the needs of laboratory environments, allowing scientists to design experiments, validate growth processes, and investigate defect formation at the earliest stages.
With the XRTmicron Lab, researchers can push the boundaries of material science, gaining insights that not only advance academic knowledge and material discovery but also lay the groundwork for new applications in power electronics, optoelectronics, and beyond.
XRTmicron Lab Features
XRTmicron Lab Specifications
Technique | X-ray topograph imaging | |
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Purpose | Non-destructive evaluation of single-crystalline materials | |
Technology | Switch between transmission and reflection topography | |
Key components | High-brightness micro X-ray source; specialized X-ray mirror optics; high-resolution, high-sensitivity X-ray camera | |
Options | HR-XTOP camera, Crystal collimator, Defect inspection done with XRT Toolbox Software | |
Wafer transfer / Sample handling | Manual handling |
XRTmicron Lab Resources
Webinars
Investigating Crystalline Defects of Semiconductors Using X-ray Topography | Watch the Recording |
Non-Destructive Dislocation Characterization in SiC Substrates Using XRTmicron Technology | Watch the Recording |
Rigaku Journal articles
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Publications
XRTmicron Lab Events
Learn more about our products at these events
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EventDatesLocationEvent website
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Thermal Analysis Technology Seminar & WorkshopOctober 15 2025 - October 15 2025Taipei, Taiwan
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Thermal Analysis Technology Seminar & WorkshopOctober 16 2025 - October 16 2025Taoyuan City, Taiwan
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SEMICON Japan 2025December 16 2025 - December 18 2025Tokyo, Japan

Contact Us
Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.