XRTmicron (Lab)
X-ray topography imaging system
For non-destructive evaluation of single-crystalline materials
Rigaku XRTmicron (Lab) is a fast, high-resolution laboratory X-ray topography system for non-destructive crystal defect imaging. Various types of dislocations, micropipes, stacking faults, small angle grain boundaries, and non-uniformity within single crystal wafers (such as Si, SiC, GaN, InP, GaAs, AlN, Ga₂O₃, sapphire, and more) can be imaged across wafers up to 300 mm in diameter.
XRTmicron (Lab) Overview
The XRTmicron (Lab) is designed for scientists conducting fundamental research in crystal growth and epitaxial layer formation. By providing high-resolution, non-destructive X-ray topography, it enables researchers to study the underlying physics of crystallographic defects and explore the mechanisms that govern material quality.
This system supports manual sample handling, from coupons to 300 mm wafers, with flexible configuration, aligns with the needs of laboratory environments, allowing scientists to design experiments, validate growth processes, and investigate defect formation at the earliest stages.
With the XRTmicron (Lab), researchers can push the boundaries of material science, gaining insights that not only advance academic knowledge and material discovery but also lay the groundwork for new applications in power electronics, optoelectronics, and beyond.
XRTmicron (Lab) Features
XRTmicron (Lab) Specifications
| Technique | X-ray topograph imaging | |
|---|---|---|
| Purpose | Non-destructive evaluation of single-crystalline materials | |
| Technology | Switch between transmission and reflection topography | |
| Key components | High-brightness micro X-ray source; specialized X-ray mirror optics; high-resolution, high-sensitivity X-ray camera | |
| Options | HR-XTOP camera, Crystal collimator, Defect inspection done with XRT Toolbox Software | |
| Wafer transfer / Sample handling | Manual handling | |
XRTmicron (Lab) Resources
Webinars
| Investigating Crystalline Defects of Semiconductors Using X-ray Topography | Watch the Recording |
| Non-Destructive Dislocation Characterization in SiC Substrates Using XRTmicron Technology | Watch the Recording |
Rigaku Journal articles
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Publications
XRTmicron (Lab) Events
Learn more about our products at these events
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EventDatesLocationEvent website
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Rigaku Taiwan professional training courses (XRD)January 23 2026 - January 23 2026Rigaku Taiwan (RTC-TW)
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Rigaku School for Practical CrystallographyJanuary 26 2026 - February 6 2026
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SEMICON Korea 2026February 11 2026 - February 13 2026COEX, South Korea
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SPIE Advanced Lithography + PatterningFebruary 22 2026 - February 26 2026San Jose, CA, USA
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Florida Semiconductor SummitFebruary 23 2026 - February 25 2026Orlando, FL, USA
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Rigaku Taiwan professional training courses (SCX)February 26 2026 - February 26 2026Rigaku Taiwan (RTC-TW)
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Applied Physics Society Autumn NagoyaMarch 15 2026 - March 16 2026Tokyo, Japan
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The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum SponsorsMarch 16 2026 - March 19 2026Monterey, CA ,USA
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SEMICON China 2026March 25 2026 - March 27 2026SNIEC, Shanghai, China
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Rigaku Taiwan professional training courses (XRD)March 27 2026 - March 27 2026Rigaku Taiwan (RTC-TW)
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CS International 2026April 20 2026 - April 22 2026Brussels, Belgium
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SEMICON SEA 2026May 5 2026 - May 7 2026Kuala Lumpur, Malaysia
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ASMC – Advanced Semiconductor Manufacturing ConferenceMay 11 2026 - May 14 2026Albany, NY, USA
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The 2026 IEEE 76th Electronic Components and Technology ConferenceMay 26 2026 - May 29 2026Orlando, Fl, USA
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CEIA Leti Innovation DaysJune 23 2026 - June 25 2026Maison Minatec, Grenoble, France
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The International Workshop on Gallium Oxide and Related Materials (IWGO-6)August 2 2026 - August 7 2026College Park, MD, USA.
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SEMICON Taiwan 2026September 2 2026 - September 4 2026Taipei, Taiwan
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ICSCRM Japan 2026 (Silver Sponsor)September 27 2026 - October 2 2026Yokohama, Japan
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SEMICON West 2026October 13 2026 - October 15 2026San Francisco, CA, USA
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SEMICON EuropaNovember 10 2026 - November 13 2026Munich, Germany
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SEMICON Japan 2026December 9 2026 - December 11 2026Tokyo, Japan
XRTmicron (Lab)
Contact Us
Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.