XRTmicron (Lab)

X-ray topography imaging system

For non-destructive evaluation of single-crystalline materials

Rigaku XRTmicron (Lab) is a fast, high-resolution laboratory X-ray topography system for non-destructive crystal defect imaging. Various types of dislocations, micropipes, stacking faults, small angle grain boundaries, and non-uniformity within single crystal wafers (such as Si, SiC, GaN, InP, GaAs, AlN, Ga₂O₃, sapphire, and more) can be imaged across wafers up to 300 mm in diameter. 

XRTmicron system doors closed XTRAIA XT Series image 2

XRTmicron (Lab) Overview

The XRTmicron (Lab) is designed for scientists conducting fundamental research in crystal growth and epitaxial layer formation. By providing high-resolution, non-destructive X-ray topography, it enables researchers to study the underlying physics of crystallographic defects and explore the mechanisms that govern material quality.

This system supports manual sample handling, from coupons to 300 mm wafers, with flexible configuration, aligns with the needs of laboratory environments, allowing scientists to design experiments, validate growth processes, and investigate defect formation at the earliest stages.

With the XRTmicron (Lab), researchers can push the boundaries of material science, gaining insights that not only advance academic knowledge and material discovery but also lay the groundwork for new applications in power electronics, optoelectronics, and beyond.

XRTmicron (Lab) Features

Broad sample compatibility
Supports coupons, full wafers, epitaxial stacks on wafers, and crystal ingots/boules. Samples up to Φ300 mm
High brilliance
Dual-wavelength MicroMax-007 source with parabolic multilayer optics
Detector suite
XTOP (5.4 µm/pixel), HR-XTOP (2.4 µm/pixel, optional), and HyPix-3000HE (100 µm/pixel, high-speed)
Sample placement considering minimization of external forces
Horizontal sample stage minimizes artificial strain in wafers
Image quality assurance
Automatic wafer curvature correction for optimal defect visualization
Automated operation
Alignment, optics/detector switching, and image collection all controlled automatically
Advanced analysis
Automated dislocation mapping and quantification for faster results

XRTmicron (Lab) Specifications

Technique X-ray topograph imaging
Purpose Non-destructive evaluation of single-crystalline materials
Technology Switch between transmission and reflection topography
Key components High-brightness micro X-ray source; specialized X-ray mirror optics; high-resolution, high-sensitivity X-ray camera
Options HR-XTOP camera, Crystal collimator, ​Defect inspection done with XRT Toolbox Software
Wafer transfer / Sample handling Manual handling

XRTmicron (Lab) Resources

Webinars

Investigating Crystalline Defects of Semiconductors Using X-ray Topography Watch the Recording
Non-Destructive Dislocation Characterization in SiC Substrates Using XRTmicron Technology Watch the Recording

Rigaku Journal articles

adobeCrystal defects in SiC wafers and a new X-ray topography system Read the Article
adobeHigh-throughput, high-resolution X-ray topography imaging system: XRTmicron Read the Article
adobeNon-destructive characterization of crystallographic defects of SiC substrates using X-ray topography for R&D and quality assurance in production Read the Article
adobeDefect structure analysis in single crystal substrates using XRTmicron Read the Article
adobeDramatic improvement in the throughput of X-ray topography Read the Article

Publications

XRTmicron (Lab) Events

Learn more about our products at these events

  • Rigaku Taiwan professional training courses (XRD)
    January 23 2026 - January 23 2026
    Rigaku Taiwan (RTC-TW)
  • Rigaku School for Practical Crystallography
    January 26 2026 - February 6 2026
  • SEMICON Korea 2026
    February 11 2026 - February 13 2026
    COEX, South Korea
  • SPIE Advanced Lithography + Patterning
    February 22 2026 - February 26 2026
    San Jose, CA, USA 
  • Florida Semiconductor Summit
    February 23 2026 - February 25 2026
    Orlando, FL, USA
  • Rigaku Taiwan professional training courses (SCX)
    February 26 2026 - February 26 2026
    Rigaku Taiwan (RTC-TW)
  • Applied Physics Society Autumn Nagoya
    March 15 2026 - March 16 2026
    Tokyo, Japan
  • The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum Sponsors
    March 16 2026 - March 19 2026
     Monterey, CA ,USA
  • SEMICON China 2026
    March 25 2026 - March 27 2026
    SNIEC, Shanghai, China
  • Rigaku Taiwan professional training courses (XRD)
    March 27 2026 - March 27 2026
    Rigaku Taiwan (RTC-TW)
  • CS International 2026
    April 20 2026 - April 22 2026
    Brussels, Belgium
  • SEMICON SEA 2026
    May 5 2026 - May 7 2026
    Kuala Lumpur, Malaysia
  • ASMC – Advanced Semiconductor Manufacturing Conference
    May 11 2026 - May 14 2026
    Albany, NY, USA
  • The 2026 IEEE 76th Electronic Components and Technology Conference
    May 26 2026 - May 29 2026
    Orlando, Fl, USA
  • CEIA Leti Innovation Days
    June 23 2026 - June 25 2026
    Maison Minatec, Grenoble, France 
  • The International Workshop on Gallium Oxide and Related Materials (IWGO-6)
    August 2 2026 - August 7 2026
     College Park, MD, USA.
  • SEMICON Taiwan 2026
    September 2 2026 - September 4 2026
    Taipei, Taiwan
  • ICSCRM Japan 2026 (Silver Sponsor)
    September 27 2026 - October 2 2026
    Yokohama, Japan
  • SEMICON West 2026
    October 13 2026 - October 15 2026
    San Francisco, CA, USA 
  • SEMICON Europa
    November 10 2026 - November 13 2026
    Munich, Germany
  • SEMICON Japan 2026
    December 9 2026 - December 11 2026
    Tokyo, Japan

Contact Us

Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.