ONYX 3200
In-line Dual-head Micro-spot XRF
Non-destructive wafer inspection and metrology
Dual X-ray source (polycapillary / monochromatic)
For up to 300 mm wafers.
ONYX 3200 Overview
The ONYX 3200 is the most advanced hybrid metrology solution in the market; with its dual head, the second-generation tool combines advanced μXRF and optical techniques to provide high accuracy in defect detection and the highest throughput for in-line semiconductor manufacturing.
The ONYX series systems are designed to provide a holistic metrology approach in all steps of the manufacturing process from FEOL through WLP, including optimal configuration for advanced packaging and single bump applications to monitor Ag/Sn ratio—proven results in measuring and identifying single solder μ-bumps less than 5μm diameter.
Optimized source capability
- Single μ-bump measurements for process monitoring
- High yield and improved throughput
- Accurate analysis for metal thickness and composition
- Maximum sensitivity for layer thickness and composition
2D Microscope |
2D Microscope Magnification |
3D Scanner |
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ONYX 3200 Features
Dual-head μXRF configuration offers analytical flexibility for optimal application performance
Monochromatic and polychromatic μXRF optics
Low-power X-ray; non-destructive
Focused vertical excitation configuration
Array of four silicon drift detectors (SDD) with a large active area and improved resolution.
Composition analysis and thickness and measurements
Fully automated calibration processes ensure long-term stability, consistency, and tube aging correction
Advanced motion platform for sub-micron accuracy
Ideal for in-line HVM metrology
ONYX 3200 Specifications
| Metrology type | Dual-head micro-spot EDXRF and optical inspection (2D-3D) | |
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| Wafer size | Up to 300 mm | |
| Wafer type | Blanket and patterned wafers | |
| Navigation | Precise stage complemented with an image recognition algorithm Sub-micron fast navigation to single feature center |
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| Micro XRF beam orientation | Vertical incidence micro-spot (µXRF) | |
| Optics | "Polychromatic” (X-ray optics) and COLORS “Monochromatic” (X-ray optics) | |
| Micro XRF beam spot size | 10-50 µm spot sizes adjustable | |
| Detector type | Silicon drift detector (SDD): 3 configurations 1. Regular > Al 2. Light-element: C, N, O, F, S 3. Heavy-element: > Ge (optimized for Ag, Sn) |
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| DPP | Digital Pulse Processor | High efficiency of more than 1 million photons/sec. | |
| X/Y stage accuracy | 0.1 µm | |
ONYX 3200 Events
Learn more about our products at these events
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EventDatesLocationEvent website
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Rigaku Taiwan professional training courses (XRD)January 23 2026 - January 23 2026Rigaku Taiwan (RTC-TW)
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Rigaku School for Practical CrystallographyJanuary 26 2026 - February 6 2026
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SEMICON Korea 2026February 11 2026 - February 13 2026COEX, South Korea
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SPIE Advanced Lithography + PatterningFebruary 22 2026 - February 26 2026San Jose, CA, USA
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Florida Semiconductor SummitFebruary 23 2026 - February 25 2026Orlando, FL, USA
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Rigaku Taiwan professional training courses (SCX)February 26 2026 - February 26 2026Rigaku Taiwan (RTC-TW)
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Applied Physics Society Autumn NagoyaMarch 15 2026 - March 16 2026Tokyo, Japan
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The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum SponsorsMarch 16 2026 - March 19 2026Monterey, CA ,USA
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SEMICON China 2026March 25 2026 - March 27 2026SNIEC, Shanghai, China
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Rigaku Taiwan professional training courses (XRD)March 27 2026 - March 27 2026Rigaku Taiwan (RTC-TW)
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CS International 2026April 20 2026 - April 22 2026Brussels, Belgium
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SEMICON SEA 2026May 5 2026 - May 7 2026Kuala Lumpur, Malaysia
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ASMC – Advanced Semiconductor Manufacturing ConferenceMay 11 2026 - May 14 2026Albany, NY, USA
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The 2026 IEEE 76th Electronic Components and Technology ConferenceMay 26 2026 - May 29 2026Orlando, Fl, USA
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CEIA Leti Innovation DaysJune 23 2026 - June 25 2026Maison Minatec, Grenoble, France
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The International Workshop on Gallium Oxide and Related Materials (IWGO-6)August 2 2026 - August 7 2026College Park, MD, USA.
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SEMICON Taiwan 2026September 2 2026 - September 4 2026Taipei, Taiwan
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ICSCRM Japan 2026 (Silver Sponsor)September 27 2026 - October 2 2026Yokohama, Japan
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SEMICON West 2026October 13 2026 - October 15 2026San Francisco, CA, USA
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SEMICON EuropaNovember 10 2026 - November 13 2026Munich, Germany
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SEMICON Japan 2026December 9 2026 - December 11 2026Tokyo, Japan
ONYX 3200
Contact Us
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