ONYX 3200
In-line Dual-head Micro-spot XRF
Non-destructive wafer inspection and metrology
Dual X-ray source (polycapillary / monochromatic)
For up to 300 mm wafers.
ONYX 3200 Overview
The ONYX 3200 is the most advanced hybrid metrology solution in the market; with its dual head, the second-generation tool combines advanced μXRF and optical techniques to provide high accuracy in defect detection and the highest throughput for in-line semiconductor manufacturing.
The ONYX series systems are designed to provide a holistic metrology approach in all steps of the manufacturing process from FEOL through WLP, including optimal configuration for advanced packaging and single bump applications to monitor Ag/Sn ratio—proven results in measuring and identifying single solder μ-bumps less than 5μm diameter.
Optimized source capability
- Single μ-bump measurements for process monitoring
- High yield and improved throughput
- Accurate analysis for metal thickness and composition
- Maximum sensitivity for layer thickness and composition
2D Microscope |
2D Microscope Magnification |
3D Scanner |
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ONYX 3200 Features
ONYX 3200 Specifications
| Metrology type | Dual-head micro-spot EDXRF and optical inspection (2D-3D) | |
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| Wafer size | Up to 300 mm | |
| Wafer type | Blanket and patterned wafers | |
| Navigation | Precise stage complemented with an image recognition algorithm Sub-micron fast navigation to single feature center |
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| Micro XRF beam orientation | Vertical incidence micro-spot (µXRF) | |
| Optics | "Polychromatic” (X-ray optics) and COLORS “Monochromatic” (X-ray optics) | |
| Micro XRF beam spot size | 10-50 µm spot sizes adjustable | |
| Detector type | Silicon drift detector (SDD): 3 configurations 1. Regular > Al 2. Light-element: C, N, O, F, S 3. Heavy-element: > Ge (optimized for Ag, Sn) |
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| DPP | Digital Pulse Processor | High efficiency of more than 1 million photons/sec. | |
| X/Y stage accuracy | 0.1 µm | |
ONYX 3200 Events
Learn more about our products at these events
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EventDatesLocationEvent website
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SEMICON SEAMay 19 2025 - May 21 2025Singapore
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EMRS Spring Meeting 2025May 25 2025 - May 29 2025Strasbourg, France
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Leti Innovation Days 2025June 24 2025 - June 26 2025Grenoble, France
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SOFC-XIXJuly 12 2025 - July 17 2025Stockholm, Sweden
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JSAP Autumn EXPOSeptember 6 2025 - September 9 2025Nagoya, Japan
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The 86th JSAP Autumn Meeting 2025September 6 2025 - September 9 2025Tokyo, Japan
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SEMICON TaiwanSeptember 9 2025 - September 11 2025Taipei, Taiwan
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EMRS Fall meeting 2025September 14 2025 - September 17 2025Warsaw, Poland
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International Conference on Silicon Carbide and Related Materials (ICSCRM 2025)September 15 2025 - September 18 2025Busan, Korea
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SEMICON JapanDecember 1 2025 - December 2 2025Tokyo, Japan
Contact Us
Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.