Understanding Semiconductors

Episode 5

Episode 5Modern metrology from Lab to Fab by Rigaku

A podcast for engineering leaders in characterization, metrology, process, and analytics, looking for discussion around semiconductor metrology challenges.

In this episode: Increased metrology means increased data. so what do we do with it? With Alex Liddle - Scientific Director at NIST.

They discuss:

  • Alex’s career journey to NIST 
  • Dimensional metrology
  • The measurement of a test structure vs. the actual structure and coverage
    • The trend to measure everything you can across the wafer
  • Key trends Alex noticed at this years Frontiers conference  
  • Stochastic failures, lithography and reliability
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The National Institute of Standards and Technology (NIST) is a physical sciences laboratory and non-regulatory agency of the United States Department of Commerce. NIST's activities are organized into laboratory programs that include nanoscale science and technology, engineering, information technology, neutron research, material measurement, and physical measurement. 


 

Visit our LinkedIn Semiconductor Metrology Solutions Showcase

Contact Markus Kuhn on LinkedIn for any potential guest requests or episode ideas.

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Host: Markus Kuhn

Markus KuhnPh.D. in Chemistry, University of Western Ontario, Canada BS Honors, University of Western Ontario, Canada. Markus is a semiconductor technology expert with a proven track record in developing, managing, and implementing novel metrology strategies and programs in support of advanced semiconductor process and architectural technology development. During a 25-year career with Intel and Digital Equipment Corporation, Markus was responsible for the development and implementation of a broad range of analytical capabilities to help meet semiconductor technology goals and was a key technical contributor to Intel's breakthrough strain, high K/metal gate, FinFET, and advanced memory programs. Currently, he is a Senior Director for Semiconductor Technology and a Fellow for Rigaku Corporation. His interests include the advancement of analytical capabilities for nanoscale devices, and he has a broader interest in the synergies between analytical characterization methods, machine learning, and process metrology to help enable emerging nanoscale device technologies. He has published 100+ refereed papers and holds 30+ patents relating to semiconductor technology. linkedin-icon

 

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