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Semiconductor

FSAS II

Automatic wafer crystal plane orientation measurement X-ray system FSAS II

Automatically measures the cutting angle, OF and notch position of the main surface of the wafer

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FSAS_II(800×600)

FSAS II Features

The cut angle of the wafer surface plane and OF/notch position are automatically measured.
The sample is held by a vacuum chuck
Automatic scanning is made for each planar rotation position at 0, 90, 180 and 270° and the peak position is detected at each position
With the wafer physical cut plane as reference, calculations and output of the deflection angle of the crystal axis are made in the X and Y directions
When a specific attachment is added, OF/notch measurement can also be carried out.
Operation is made using a touch-panel
Measurement errors caused by operator can be eliminated thanks to automatic measurement and calculation

FSAS II Specifications

FSAS II Resources

FSAS II Events

Learn more about our products at these events

  • ASMC – Advanced Semiconductor Manufacturing Conference
    May 11 2026 - May 14 2026
    Albany, NY, USA
    Website
  • WOCSDICE/EXMATEC 2026
    May 24 2026 - May 28 2026
    Gdańsk, Poland
    Website
  • The 2026 IEEE 76th Electronic Components and Technology Conference
    May 26 2026 - May 29 2026
    Orlando, Fl, USA
    Website
  • 9th International Workshop on Crystal Growth Technology (IWCGT-9)
    June 8 2026 - June 11 2026
    Berlin, Germany
    Website
  • CEIA Leti Innovation Days
    June 23 2026 - June 25 2026
    Maison Minatec, Grenoble, France 
    Website
  • UK Semiconductors Conference
    July 1 2026 - July 2 2026
    Sheffield, UK
    Website
  • The International Workshop on Gallium Oxide and Related Materials (IWGO-6)
    August 2 2026 - August 7 2026
     College Park, MD, USA.
    Website
  • SEMICON Taiwan 2026
    September 2 2026 - September 4 2026
    Taipei, Taiwan
    Website
  • ICSCRM Japan 2026 (Silver Sponsor)
    September 27 2026 - October 2 2026
    Yokohama, Japan
    Website
  • SEMICON West 2026
    October 13 2026 - October 15 2026
    San Francisco, CA, USA 
    Website
  • SEMICON Europa
    November 10 2026 - November 13 2026
    Munich, Germany
    Website
  • German Epitaxy Workshop
    November 25 2026 - November 27 2026
    Freiburg, Germany
    Website
  • SEMICON Japan 2026
    December 9 2026 - December 11 2026
    Tokyo, Japan
    Website

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