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Thickness and Composition of Piezoelectric PZT Films

Application Note RSMD006

WDXRF can monitor piezoelectric PZT film thickness and composition with high precision and throughput.

Thin PZT repeatability test

Metrology Tool: WDA-3650
Indicators: 15 mm collimator, 60 sec count time

  PZT_THK PbO ZrO₂ TiO₂
  nm mol% mol% mol%
1 62.6 34.98 30.09 34.93
2 62.8 34.75 30.31 34.94
3 62.7 34.87 30.05 35.08
4 62.8 34.82 30.24 34.94
5 62.6 34.85 30.21 34.94
6 62.7 34.86 30.10 35.04
7 62.7 34.73 30.24 35.04
8 62.7 34.85 30.13 35.02
9 62.7 34.90 30.01 35.09
10 62.6 34.94 29.95 35.11
Average 62.7 34.85 30.18 34.97
Maximum 62.8 34.98 30.31 35.08
Minimum 62.6 34.75 30.05 34.93
Range 0.2 0.23 0.26 0.15
s.d. 0.08 0.084 0.108 0.064
r.s.d. (%) 0.13 0.24 0.36 0.18

Thick PZT repeatability test

Metrology Tool: WDA-3650
Indicators: 10 mm collimator, 40 sec count time

  PZT_THK PbO ZrO₂ TiO₂
  nm mol% mol% mol%
1 3931.3 54.48 24.27 21.25
2 3927.1 54.48 24.33 21.19
3 3921.9 54.52 24.26 21.22
4 3928.3 54.45 24.33 21.21
5 3924.5 54.48 24.34 21.18
6 3928.0 54.49 24.30 21.22
7 3828.9 54.44 24.31 21.25
8 3928.5 54.47 24.32 21.21
9 3929.3 54.47 24.28 21.25
10 3930.1 54.46 24.29 21.25
Average 3927.8 54.47 24.30 21.22
Maximum 3931.3 54.52 24.34 21.25
Minimum 3921.9 54.44 24.26 21.18
Range 9.4 0.08 0.08 0.07
s.d. 3.60 0.025 0.038 0.027
r.s.d. (%) 0.09 0.05 0.16 0.13

 

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