XTRAIA MF-3000
XRR, EDXRF, and XRD Metrology Tool
For composition and thickness (EDXRF), thickness, density, and roughness (XRR) for unpatterned and patterned films for up to 300 mm wafers
For thin-film applications, precise measurements of small areas are obtained, and high brightness is achieved in localized spots.
The Rigaku XTRAIA MF-3000 (formerly MFM310) performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.
XTRAIA MF-3000 Overview
Designed for high-volume manufacturing
The XTRAIA MF-3000 is designed with high-volume 200 mm and 300 mm manufacturing in mind: high-throughput thickness measurement by XRR and XRF, low-contamination wafer handling and pattern recognition-based position control for product wafer measurements, CE Marking and S2/S8 Compliance for semiconductor production clean room operation, compliance with GEM300/HSMS and factory automation standards, high-reliability machine performance and low power consumption and cost of ownership.
COLORS enabling technology
COLORS X-ray optics were developed by Rigaku for the XTRAIA MF-3000 to enable measurements from small areas. COLORS beam modules couple a variety of XRF excitation sources with optics and are optimized to provide high brightness in small spots for a variety of thin film applications. With its own X-ray optics business, Rigaku is well-positioned develop and manufacture X-ray sources for current and future market needs.
XTRAIA MF-3000 Features
XTRAIA MF-3000 Videos
XTRAIA MF-3000 Specifications
| Technique | X-ray reflectometry (XRR), energy dispersive X-ray Fluorescence (EDXRF), X-ray diffraction (XRD) | |
|---|---|---|
| Benefit | High-throughput measurement of blanket and product wafers from ultra-thin films to micron-order films, applicable to a wide range of thickness and film types | |
| Technology | Process micro-spot XRR, EDXRF, and XRD | |
| Attributes | Blanket and patterned wafer metrology Choice of monochromatic, micro-spot X-ray beam modules (COLORS) |
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| Features | Ultra-fast detector with up to 10⁸ dynamic range Dual FOUP load ports |
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| Options | GEM300 software, E84/OHT support | |
| Dimensions | 1400 (W) x 2050 (H) x 3410 (D) mm | |
| Measurement results | EDXRF: Film thickness and composition XRR: Film thickness, density, and roughness |
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XTRAIA MF-3000 Events
Learn more about our products at these events
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EventDatesLocationEvent website
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Rigaku School for Practical CrystallographyJanuary 26 2026 - February 6 2026
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SEMICON Korea 2026February 11 2026 - February 13 2026COEX, South Korea
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SPIE Advanced Lithography + PatterningFebruary 22 2026 - February 26 2026San Jose, CA, USA
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Florida Semiconductor SummitFebruary 23 2026 - February 25 2026Orlando, FL, USA
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Rigaku Taiwan professional training courses (SCX)February 26 2026 - February 26 2026Rigaku Taiwan (RTC-TW)
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Applied Physics Society Autumn NagoyaMarch 15 2026 - March 16 2026Tokyo, Japan
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The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum SponsorsMarch 16 2026 - March 19 2026Monterey, CA ,USA
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SEMICON China 2026March 25 2026 - March 27 2026SNIEC, Shanghai, China
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Rigaku Taiwan professional training courses (XRD)March 27 2026 - March 27 2026Rigaku Taiwan (RTC-TW)
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CS International 2026April 20 2026 - April 22 2026Brussels, Belgium
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SEMICON SEA 2026May 5 2026 - May 7 2026Kuala Lumpur, Malaysia
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ASMC – Advanced Semiconductor Manufacturing ConferenceMay 11 2026 - May 14 2026Albany, NY, USA
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WOCSDICE/EXMATEC 2026May 24 2026 - May 28 2026Gdańsk, Poland
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The 2026 IEEE 76th Electronic Components and Technology ConferenceMay 26 2026 - May 29 2026Orlando, Fl, USA
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CEIA Leti Innovation DaysJune 23 2026 - June 25 2026Maison Minatec, Grenoble, France
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The International Workshop on Gallium Oxide and Related Materials (IWGO-6)August 2 2026 - August 7 2026College Park, MD, USA.
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SEMICON Taiwan 2026September 2 2026 - September 4 2026Taipei, Taiwan
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ICSCRM Japan 2026 (Silver Sponsor)September 27 2026 - October 2 2026Yokohama, Japan
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SEMICON West 2026October 13 2026 - October 15 2026San Francisco, CA, USA
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SEMICON EuropaNovember 10 2026 - November 13 2026Munich, Germany
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SEMICON Japan 2026December 9 2026 - December 11 2026Tokyo, Japan
XTRAIA MF-3000
Contact Us
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