Vacuum transport robots
Rigaku’s magnetic fluid seal units have been actively responding to your needs in diverse applications for clean / vacuum robots.
Learn more >
CVD equipment
We have been offering many magnetic fluid seals to major CVD equipment manufacturers for a long time and they have been officially applying to their products.
Learn more >
Sputtering systems
Many of Rigaku’s magnetic fluid seals have been adopted for the sputtering systems that form transparent conductive coatings and antireflective coatings necessary for the manufacturing of solar cells, touchscreens, flat panel displays, etc.
Learn more >
Ion implanters
Transmitting high-speed rotation while minimizing center runouts and resonances,
Learn more >
Single crystal pulling equipment
When pulling up crystal ingots exceeding φ300 mm, a powerful magnetic field such as the MCZ method and the cusped magnetic field method is required. Therefore, the magnetic fluid seal used in this application must not be affected by the magnetic field.
Learn more >
Vacuum chucks
Vacuuming through a magnetic seal can eliminate the unnecessary space, which not only brings an advantage of downsizing of the equipment as a whole but also provides stable rotation performance. For this reason, the demand in magnetic seals for vacuum chuck has been gradually increasing.
Learn more >
Etching systems
A wide range of specifications and processing methods are used in etching systems, including those for active gases, high temperatures, high-speed rotations, plasmas, electrodes, ion beams, strong magnetic fields, and leakage magnetic fluxes.
Learn more >
Epitaxial growth systems
Because our magnetic seals can be used for high-speed rotation, high vacuum performance, and active gas atmosphere of chloride, metal organic gases, etc., they are ideal for various epitaxial growth systems.
Learn more >
Roll-to-roll film forming equipment
Unlike O-ring seals and mechanical seals, magnetic fluid seals have no dust generation from wear and cause no worries about contamination of film surfaces, they are ideal for roll-to-roll film forming equipment.
Learn more >
X-ray generators
X-ray generators work by causing thermal electrons to collide with a target rotating at a high speed in a high vacuum, thus generating X-rays.
Learn more >
Stirrers
Our magnetic seals can be used for both negative pressure and positive pressure, ensuring almost zero leakage. They can be also used for the shaft seal of pressure reactors, mixing tanks, vacuum mixers (kneading machines), and vacuum deformers.
Learn more >
Gas introduction mechanisms
Gas introduction from a magnetic seal allows equipment as a whole to be simpler and more efficient.
Learn more >
Arc dischargers
Dust-free, clean and long-life Rigaku magnetic seals are ideal for rotation of a table and a target at an arc ion plating equipment.
Learn more >
Vacuum / pressurized furnaces
For the introduction of rotation for the fan to circulate the pressurized gas, many magnetic seals of Rigaku have been used. The high shaft rigidity due to Rigaku’s unique magnetic seal structure enables high load resistance and high torque transmission.
Learn more >
Contact Us
Whether you're interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.