Roll-to-roll film forming equipment

For manufacturing of flexible devices such as displays, lightings and solar cells

In the roll-to-roll film forming method, a rolled film substrate is unwound in vacuum first, then films are continuously formed by sputtering, vapor deposition, CVD or other methods, and the formed films are rewound to a roll at the end.

Film forming by the roll-to-roll method is considered as one of the important manufacturing technologies to realize mass production of flexible devices represented by displays and solar cells.

Unlike O-ring seals and mechanical seals, magnetic fluid seals have no dust generation from wear and cause no worries about contamination of film surfaces, they are ideal for roll-to-roll film forming equipment.

Rigaku’s magnetic fluid seals will satisfy your needs in achieving higher throughput, higher quality, lower costs, etc. in your process.

Magnetic fluid seals suitable for roll-to-roll film forming equipment

Magnetic fluid seals of the hollow shaft type are suitable for this application as you can use a rotary shaft of non-magnetic material type, long type or other special shape type.

You can select from the standard F1T-B series with the standard structure and the cantilever F1T-C series with no bearing arranged in the vacuum side.

F1B-C

F1T-C (using a cross-roller bearing)

Please tell us your operating conditions first. We will propose the most suitable magnetic seal for you.