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Crystal orientation evaluation of epitaxial film and ultra-thin buffer layers by in-plane reciprocal space mapping

AppNote B-XRD2006: Crystal orientation evaluation of epitaxial film and ultra-thin buffer layers by in-plane reciprocal space mapping

Introduction

ZnO is drawing attention as a new material for transparent conductive films and is expected to be used in flat-panel displays and white LEDs. For the evaluation of the epitaxial-film materials, it is important to understand the relationship of the crystal orientation between the substrate and the film. In-plane reciprocal space mapping reveals the crystal orientation in the sample in-plane direction.

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