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Semiconductor Metrology Tools
X-ray metrology solutions from lab to fab
Crystallography
X-ray and electron diffraction for crystallography
X-ray Diffraction & Scattering
X-ray diffractometers for crystalline materials analysis
XRF Spectrometers
X-ray fluorescence spectrometers for elemental analysis
Imaging & Non-destructive Testing
Computed tomography and radiography systems for X-ray imaging
Thermal Analysis
Thermal and evolved gas analysis instruments for materials characterization
Handheld Raman
Handheld Raman spectrometers for materials identification
Components
X-ray sources, detectors, optics, magnetic fluid feedthroughs, and high-voltage supplies
Process Control
In-line monitoring systems
Semiconductor Metrology Tools
X-ray metrology solutions from lab to fab
WDXRF
Flexible elemental analysis for thin films
XRR, EDXRF & Optical
X-ray and hybrid metrology solutions for blanket and patterned wafers
TXRF
Wafer surface contamination metrology
HRXRD
X-ray metrology for epitaxial films
XRT
Non-destructive dislocation imaging
XRD
X-ray diffraction for crystallographic orientation of wafers and ingots
CDSAXS
X-ray critical dimension metrology
X-ray Diffraction & Scattering
X-ray diffraction and scattering analyses for atomic level materials characterization
XRD
X-ray diffractometers for polycrystalline materials characterization
SAXS
Small angle X-ray scattering for nanoscale size, shape, and morphology analyses
Stress Analysis
X-ray diffractometers for non-destructive residual stress analysis
XRF Spectrometers
X-ray fluorescence spectrometers for elemental analysis
EDXRF
Energy dispersive X-ray fluorescence spectrometers for elemental analysis
WDXRF
Wavelength dispersive X-ray fluorescence spectrometers for elemental analysis
Micro-XRF
Focuses X-rays onto a microscopic area to locally analyze elemental composition
TXRF
Total reflection X-ray fluorescence spectrometers for surface and trace phase analysis
Imaging & Non-destructive Testing
Non-destructive imaging analysis by X-rays
X-ray Computed Tomography
Research grade industrial X-ray computed tomography for non-destructive 3D imaging
NDT Products
Radiography instruments for non-destructive testing
Molecular Imaging
Multimodal molecular imaging systems for pre-clinical studies
All thermal analysis equipment
Thermal analysis equipment for elucidating the thermal behavior of materials
DSC
Devices that detect changes in thermal energy that occur within a sample when it is heated or cooled
STA (TG-DSC)
Material analysis equipment that detects mass changes and thermal energy changes occurring with a sample
TMA
Analytical devices that detect changes in the shape of a sample when the sample is heated or cooled
Evolved Gas Analysis
Evolved gas analysis instruments for materials characterization
Other thermal analysis equipment
Other thermal analysis attachments
Software
Measurement and analysis software for thermal analysis and evolved gas
Components
X-ray sources, detectors, optics, magnetic fluid feedthroughs, and high-voltage supplies
X-ray sources
High-brilliance X-ray sources
Optics
X-ray and ultraviolet multilayer and crystalline optics
Detectors
Research-grade X-ray detectors
Magnetic Fluid Feedthroughs
Magnetic fluid feedthrough components
Miniature X-ray sources and high-voltage systems
Enabling small and powerful portable and handheld systems
All Industries
Overview of all industries we serve
Nanotechnology & Materials Sciences
Structure analysis from atomic to micron scale
Semiconductor & Electronic Devices
Metrology tools from lab to fab
Biotechnology & Life Sciences
Atomic, nano- to micron-scale organic materials characterization
Environment & Energy
Mineralogical and elemental analysis for industrial and environmental needs
Construction
Mineralogical and elemental analysis for construction materials
Safety & Security
Tools for chemical threat identification and forensics
Academic Research
Analytical instruments for teaching and synchrotron beamline components
Nanotechnology & Materials Sciences
Structure analysis from atomic to micron scale
Materials Science Research
Crystalline structure, nanoscale morphology, and elemental analyses for materials science
Nanotechnology
Atomic to nanoscale materials characterization for nanotechnology research
Advanced & New Materials
State-of-the-art analysis techniques developed for advanced and new materials research
Chemistry
A wide range of analysis tools for solutions to study liquids, powders, solids, films, or single crystals
Coatings & Thin films
Elemental, crystallographic, and structural characterization tools for coatings and thin films
Metals & Alloys
Elemental, crystalline phase, and texture analysis for metals and alloys
Polymers, Plastics
Analysis tools for additive concentration, percent crystallinity calculation, and advanced materials characterization
Composites
High-resolution 3D imaging for characterization of fillers, fibers, pores, and cracks in composites
Ceramics
Crystalline phase and elemental analyses for ceramics characterization
Biotechnology & Life Sciences
Atomic, nano- to micron-scale organic materials characterization
Pharmaceuticals
Crystalline structure and elemental analyses from drug discovery to process control
Life Science Researches
Protein and small molecule crystallography and various imaging instruments for life science research
Biotechnology
Crystalline structure, nanoscale structure, and elemental analyses for engineered biological materials
Food & Food Ingredients
Elemental analysis and foreign object screening for food and food ingredients safety
Cosmetics
Crystalline structure and elemental analyses for R&D, QC, and materials identification for anti-counterfeit prevention
Environment & Energy
Mineralogical and elemental analysis for industrial and environmental needs
Batteries
Crystalline structure characterization of electrode for R&D and non-destructive imaging for failure analysis
Mining & Refining
Elemental and mineralogical analysis for every stage of R&D and process control
Environment & Pollution
Heavy metal analysis for contamination monitoring and recycling materials classification
Geology & Minerals
Mineralogical and elemental analysis for in-depth study of geological specimens, and natural and artificial minerals
Petroleum & Petrochemicals
Mineralogical and elemental analysis for exploration, production, and distribution process
Photovoltaics
Crystalline and elemental analysis for thin-film photovoltaic materials
All Resources
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Events & Webinars Calendar
Upcoming events and webinars
Newsletters
Rigaku newsletters for materials science, crystallography, X-ray CT, and semiconductor metrology
Technique Library
Learn more about techniques for your analysis needs
Application Library
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Rigaku Journal
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Blogs
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On-demand Webinars
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Publication Library
See how our products are used in published journal articles
eBooks
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Rigaku Oxford Diffraction Forum
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Rigaku is working to make a better and more sustainable world
Products
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About Us
Semiconductor Metrology Tools
Crystallography
X-ray Diffraction & Scattering
XRF Spectrometers
Imaging & Non-destructive Testing
Thermal Analysis
Components
Nanotechnology & Materials Sciences
Semiconductor & Electronic Devices
Biotechnology & Life Sciences
Environment & Energy
Construction
Safety & Security
Academic Research