Micro-X-ray fluorescence (μXRF)

Micro-X-ray fluorescence (μXRF) is an analytical technique that focuses X-rays onto a microscopic area to locally analyze the elemental composition of a sample. It enables the evaluation of element distributions and localized compositional variations that cannot be identified from bulk-average information alone. As a non-destructive method, μXRF supports analyses ranging from microscopic spot measurements to elemental mapping.

As materials and products become increasingly advanced and miniaturized, understanding localized compositional changes and identifying anomalous regions have become essential. By visualizing where specific elements are present within a sample, μXRF provides valuable insights for composition analysis, coating thickness evaluation, and root-cause investigations of defects or abnormal areas. It is widely applied to the characterization of complex samples, including electronic devices, batteries, advanced materials, minerals, and foreign contaminants.