XTRAIA MF-3000-R
Non-destructive microspot multipurpose X-ray metrology tool. Advanced measurements for multilayer films, EUV masks, and semiconductor applications.
- Combines XRR, XRF, and XRD in one tool
- Microspot measurement from 20–85 µm
- Compatible with patterned and blanket films
- Supports EUV mask characterization
The XTRAIA MF-3000-R is a multifunction metrology system combining reflectometry (XRR), fluorescence (XRF), and diffraction (XRD) technologies. It delivers precise analysis of thickness, composition, density, and crystallinity. Its microspot beam configurations and dual-detector architecture support detailed evaluations of EUV masks and semiconductor thin films.
This tool is suited for advanced process development and production control, offering SEMI-compliant safety standards and flexible automation features.
XTRAIA MF-3000-R Overview
The XTRAIA MF-3000-R is a high-precision metrology tool designed for thin-film characterization. It combines advanced X-ray reflectometry (XRR), X-ray fluorescence (XRF), and X-ray diffraction (XRD) for thickness, density, roughness, and crystallinity measurements. This tool is ideal for demanding semiconductor and EUV mask evaluations.
XTRAIA MF-3000-R Features
XTRAIA MF-3000-R Specifications
| Technique | XRR, EDXRF, XRD | |
|---|---|---|
| Sensitivity | Sub-nanometer to micron thickness | |
| Sample compatibility | EUV masks, blanket/patterned substrates | |
| Measurement items | Film thickness, density, composition, roughness | |
| Resolution | High spatial and material resolution | |
| Benefit | Comprehensive film evaluation in a single tool | |
| Automation | Recipe-based operation with safety compliance | |
| Technology | Theta-theta goniometer, HyPix and SDD detectors | |
| Compliance | SEMI S2/S8, GEM300, CE, NFPA, EU directives | |
| Throughput | High-throughput, automated mapping | |
| Core attributes | High-accuracy, micro-spot targeting | |
| Core features | Real-time analysis of density, crystallinity, thickness | |
| Options | GEM300 support, E84/OHT interface | |
| Measurement results | Multi-parameter film data for QA/QC and development | |
XTRAIA MF-3000-R Options
- GEM300 software
- OHT integration
- Application-specific configuration kits
The following accessories are available for this product:
XTRAIA MF-3000-R Events
Learn more about our products at these events
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EventDatesLocationEvent website
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SEMICON JapanDecember 1 2025 - December 2 2025Tokyo, Japan
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