XTRAIA MF-3000-R

Non-destructive microspot multipurpose X-ray metrology tool. Advanced measurements for multilayer films, EUV masks, and semiconductor applications.

  • Combines XRR, XRF, and XRD in one tool
  • Microspot measurement from 20–85 µm
  • Compatible with patterned and blanket films
  • Supports EUV mask characterization

The XTRAIA MF-3000-R is a multifunction metrology system combining reflectometry (XRR), fluorescence (XRF), and diffraction (XRD) technologies. It delivers precise analysis of thickness, composition, density, and crystallinity. Its microspot beam configurations and dual-detector architecture support detailed evaluations of EUV masks and semiconductor thin films.

This tool is suited for advanced process development and production control, offering SEMI-compliant safety standards and flexible automation features.

XTRAIA MF-3000-R

XTRAIA MF-3000-R Overview

The XTRAIA MF-3000-R is a high-precision metrology tool designed for thin-film characterization. It combines advanced X-ray reflectometry (XRR), X-ray fluorescence (XRF), and X-ray diffraction (XRD) for thickness, density, roughness, and crystallinity measurements. This tool is ideal for demanding semiconductor and EUV mask evaluations.

XTRAIA MF-3000-R Features

X-ray spot size
Multiple configurations from φ20 μm to φ85 μm (FWHM)
Multilayer analysis
Up to 200 nm total film thickness
Density analysis
Layer-by-layer density mapping
High-resolution optics
HyPix detectors with advanced configuration options
Software
Includes XRR, XRF, and XRD analysis tools; optional GEM300
Industry standards
Designed to SEMI S2/S8 standards for radiation safety

XTRAIA MF-3000-R Specifications

Technique XRR, EDXRF, XRD
Sensitivity Sub-nanometer to micron thickness
Sample compatibility EUV masks, blanket/patterned substrates
Measurement items Film thickness, density, composition, roughness
Resolution High spatial and material resolution
Benefit Comprehensive film evaluation in a single tool
Automation Recipe-based operation with safety compliance
Technology Theta-theta goniometer, HyPix and SDD detectors
Compliance SEMI S2/S8, GEM300, CE, NFPA, EU directives
Throughput High-throughput, automated mapping
Core attributes High-accuracy, micro-spot targeting
Core features Real-time analysis of density, crystallinity, thickness
Options GEM300 support, E84/OHT interface
Measurement results Multi-parameter film data for QA/QC and development

XTRAIA MF-3000-R Options

  • GEM300 software
  • OHT integration
  • Application-specific configuration kits

The following accessories are available for this product:

XTRAIA MF-3000-R Events

Learn more about our products at these events

  • JSAP Autumn EXPO
    September 6 2025 - September 9 2025
    Nagoya, Japan
  • The 86th JSAP Autumn Meeting 2025
    September 6 2025 - September 9 2025
    Tokyo, Japan
  • SEMICON Taiwan
    September 9 2025 - September 11 2025
    Taipei, Taiwan
  • EMRS Fall meeting 2025
    September 14 2025 - September 17 2025
    Warsaw, Poland
  • International Conference on Silicon Carbide and Related Materials (ICSCRM 2025) 
    September 15 2025 - September 18 2025
    Busan, Korea
  • SEMICON Japan
    December 1 2025 - December 2 2025
    Tokyo, Japan

Contact Us

Whether you are interested in getting a quote, want a demo, need technical support, or simply have a question, we're here to help.