TXRF 310Fab-R
Advanced tool for ultratrace elemental contamination analysis
- Detects ultra-trace elemental contamination
- Fully automated and fab-compatible
- Supports process control in semiconductor manufacturing
- Non-destructive surface analysis
The TXRF 310Fab-R offers highly sensitive detection of surface contamination using total reflection X-ray fluorescence (TXRF). Designed for both research and high-volume semiconductor environments, it delivers accurate, repeatable measurements for process monitoring and defect reduction.
With full SECS/GEM integration and a 3-beam optical configuration, the system ensures efficient throughput and is compliant with global safety and environmental standards. It supports spatial mapping and automated diagnostics, enabling continuous yield improvement.
TXRF 310Fab-R Overview
The TXRF 310Fab-R is an advanced metrology tool designed for ultra-trace elemental contamination analysis on semiconductor materials. It offers non-destructive analysis while maintaining sample integrity, making it ideal for laboratory research and high-throughput semiconductor fabrication. This tool provides precise contamination diagnostics to improve process monitoring and yield optimization and is engineered to meet international regulatory standards for safe global deployment.
TXRF 310Fab-R Features
TXRF 310Fab-R Specifications
| Technique | Total reflection X-ray fluorescence (TXRF) | |
|---|---|---|
| Sensitivity | Al <2.5E11 atoms/cm², Ni <1E9 atoms/cm² | |
| Sample compatibility | Wafers, photomasks | |
| Measurement items | Surface elemental contamination | |
| Resolution | Trace level quantification | |
| Benefit | Rapid diagnostics for contamination control | |
| Automation | Fully automated with fab communication support | |
| Technology | 3-beam system, automatic optics exchange | |
| Compliance | CE, NFPA, EU directives, GEM300, SEMI S2/S8 | |
| Throughput | High-throughput mapping and monitoring | |
| Core attributes | Recipe-based operation, consistent repeatability | |
| Core features | Real-time diagnostics, high-sensitivity detection | |
| Options | E84/OHT support, advanced mapping tools | |
| Measurement results | Elemental maps, trace-level spectra | |
TXRF 310Fab-R Options
- Extended mapping resolution
- Custom holders for non-standard substrates
- Enhanced reporting tools
The following accessories are available for this product:
TXRF 310Fab-R Events
Learn more about our products at these events
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EventDatesLocationEvent website
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SPIE Advanced Lithography + PatterningFebruary 22 2026 - February 26 2026San Jose, CA, USA
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Florida Semiconductor SummitFebruary 23 2026 - February 25 2026Orlando, FL, USA
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Rigaku Taiwan professional training courses (SCX)February 26 2026 - February 26 2026Rigaku Taiwan (RTC-TW)
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JSAP Spring Meeting 2026March 15 2026 - March 16 2026Tokyo, Japan
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The 2026 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) Platinum SponsorsMarch 16 2026 - March 19 2026Monterey, CA ,USA
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SEMICON China 2026March 25 2026 - March 27 2026SNIEC, Shanghai, China
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Rigaku Taiwan professional training courses (XRD)March 27 2026 - March 27 2026Rigaku Taiwan (RTC-TW)
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CS International 2026April 20 2026 - April 22 2026Brussels, Belgium
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SEMICON SEA 2026May 5 2026 - May 7 2026Kuala Lumpur, Malaysia
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ASMC – Advanced Semiconductor Manufacturing ConferenceMay 11 2026 - May 14 2026Albany, NY, USA
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WOCSDICE/EXMATEC 2026May 24 2026 - May 28 2026Gdańsk, Poland
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The 2026 IEEE 76th Electronic Components and Technology ConferenceMay 26 2026 - May 29 2026Orlando, Fl, USA
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CEIA Leti Innovation DaysJune 23 2026 - June 25 2026Maison Minatec, Grenoble, France
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The International Workshop on Gallium Oxide and Related Materials (IWGO-6)August 2 2026 - August 7 2026College Park, MD, USA.
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SEMICON Taiwan 2026September 2 2026 - September 4 2026Taipei, Taiwan
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ICSCRM Japan 2026 (Silver Sponsor)September 27 2026 - October 2 2026Yokohama, Japan
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SEMICON West 2026October 13 2026 - October 15 2026San Francisco, CA, USA
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SEMICON EuropaNovember 10 2026 - November 13 2026Munich, Germany
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SEMICON Japan 2026December 9 2026 - December 11 2026Tokyo, Japan
TXRF 310Fab-R
Contact Us
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