Vacuum Feedthroughs

Magnetic rotary feethrough seal units are the optimal way to introduce rotary motion into vacuum or differential pressure environments. Magnetic fluid seals have higher performance than other general-purpose seals such as oil seals and have been mainly used as rotary seal units in vacuum systems for semiconductors and FDP industries.

The origin of Rigaku’s magnetic fluid seal units goes back to 1952 when Rigaku commercialized a rotating anode X-ray generator for the first time in the world. Although they were originally the built-in units for in-house products, Rigaku Mechatronics was established in 1989 as a manufacturer of magnetic fluid seal units based on the technologies accumulated by that time. Our products have been widely selected as a clean shaft bearing to solve various issues in the needs from customers who put the highest priority on reliability.

Visit the Rigaku Mechatronics website to learn more.