Specialized EUV optics

    Large Specialized Optics For EUV And X-ray Radiation

    Custom designed large optics of various shapes for EUV and X-ray facilities and laboratory sources

    Rigaku Innovative Technologies Europe s.r.o. (RITE) implements cutting edge technologies in the ray tracing, design, manufacturing and testing X-ray optics for EUV, XUV and X-ray radiation. RITE’s primary focus has been research & development projects which have resulted in an extension of Rigaku’s X-ray optics and detectors for EUV/XUV, hard and soft X-rays.

    To achieve larger and bigger optics, RITE is using manufacturing techniques other than replication. Proprietary techniques and processes enable RITE to commercially produce optics with a diameter of up to 300 mm and segment lengths of up to 250 mm. When several segments are combined, optics lengths of up to 1000 mm are easily produced.

    Specialized EUV optics Features

    Au, Ni, Ru etc. optical surface material
    9.5 mrad grazing angle at the mirror input (R≥ 50%)
    EUV (60 – 200 eV)
    soft X-ray (200 – 2000 eV)
    X-ray (2 – 10 keV)
    Elliptical, parabolic, other aspherical optical shapes on request
    Typical surface roughness
    Ra ≈ 0.5 – 2 nm

    Specialized EUV optics Specifications

    Micro roughness of NiP layer:
    Average Roughness Ra (nm) Root Mean Square RMS (nm)
    10 μm × 10 μm 0.86 1.12
    10 μm × 10 μm 0.88 1.15
    1 μm × 1 μm 0.4 0.52
    1 μm × 1 μm 0.47 0.59
    Micro roughness of Ru layer:
    Average Roughness Ra (nm) Root Mean Square RMS (nm)
    10 μm × 10 μm 0.72 0.91
    1 μm × 1 μm 0.27 0.34

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