Specialized EUV Optics
Large Specialized Optics For EUV And X-ray Radiation
Custom designed large optics of various shapes for EUV and X-ray facilities and laboratory sources
Rigaku Innovative Technologies Europe s.r.o. (RITE) implements cutting edge technologies in the ray tracing, design, manufacturing and testing X-ray optics for EUV, XUV and X-ray radiation. RITE’s primary focus has been research & development projects which have resulted in an extension of Rigaku’s X-ray optics and detectors for EUV/XUV, hard and soft X-rays.
To achieve larger and bigger optics, RITE is using manufacturing techniques other than replication. Proprietary techniques and processes enable RITE to commercially produce optics with a diameter of up to 300 mm and segment lengths of up to 250 mm. When several segments are combined, optics lengths of up to 1000 mm are easily produced.
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Specialized EUV Optics Features
soft X-ray (200 – 2000 eV)
X-ray (2 – 10 keV)
Specialized EUV Optics Specifications
| Micro roughness of NiP layer: | ||
|---|---|---|
| Average Roughness Ra (nm) | Root Mean Square RMS (nm) | |
| 10 μm × 10 μm | 0.86 | 1.12 |
| 10 μm × 10 μm | 0.88 | 1.15 |
| 1 μm × 1 μm | 0.4 | 0.52 |
| 1 μm × 1 μm | 0.47 | 0.59 |
| Micro roughness of Ru layer: | ||
| Average Roughness Ra (nm) | Root Mean Square RMS (nm) | |
| 10 μm × 10 μm | 0.72 | 0.91 |
| 1 μm × 1 μm | 0.27 | 0.34 |
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