Replicated optics

For EUV And X-ray Radiation

Custom designed optics of various shapes for EUV and X-ray facilities and laboratory sources

RITE manufactures and sells Total Reflection X-ray optics. Total Reflection X-ray Optics are specially designed to satisfy both the evolving EUV/XUV industry and the more established hard and soft X-ray applications.

Replicated optics Overview

RITE has mastered a unique manufacturing technology called replication. This manufacturing technique enables the production of X-ray optics with unique optical features such as low weight, high surface precision (low slope error) and extremely low micro-roughness. Another interesting attribute of Total Reflection Optics is the use of various metallic layers as coatings. The most commonly used materials are Ni, Au, Mo and Ru


Ellipsoidal focusing optics


Parabolic collimating optics

replicated4Au vs. Ru, up to 2x higher reflectivity using ruthenium layer


Replicated optics Features

Optical surface material
Au, Ni, Ru, Mo, etc…
Most advanced replication technology
  • Spectral range: EUV (60 – 200 eV)
  • Soft X-ray (200 – 2000 eV)
  • Hard X-ray (2000 – 10000 eV)
Optical shape
Elliptical, parabolic and other aspherical shapes available upon request
Typical surface roughness
Ra ≈ 0.3 – 2 nm
Typical dimensions
Diameter (D): 5 – 250 mm
Length (L): 10 – 130 mm

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