The quantitative analysis for commercial aqueous standard sample was carried out with internal standard method. The protocol of the internal standard method is: (1) Measure out a sample (2) Add internal standard (3) Mix well (4) Collect few μL aliquot (5) Drop onto a reflector (6) Dry In general, the internal standard element is selected from one which is not contained in the sample. The internal standard sample was prepared with 10 ppm of Ga in this measurement. Results with excellent reproducibility of measurement were obtained. The quantification of elements for the internal standard was carried out using relative sensitivity. The result shows good agreement with the standard values. It is easily possible to measure trace elements in the aqueous samples using internal standard method. The environmental analysis such as effluent and impurity test of the beverages are suitable application of this method.
The new, next generation benchtop total reflection X-ray fluorescence (TXRF) spectrometer
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers