It is possible to measure small amount of the powder sample with high sensitivity by TXRF spectrometer. And easy sample preparation is provided just the sample set on the substrate such as glass disk. High sensitive analysis if small amount of powder can be done by TXRF spectrometer much easily than by general XRF spectrometer. The sample for the measurement stays on the substrate, because the horizontal sample setting is employed in NANOHUNTER II. Water or adhesive is not required to fix the sample on the substrate disk. Only the information from the sample can be detected without any interference. The ultra-small amount (50 ug) of the soil standard sample, SRM2711: Montana soil, is put on the glass disk. The ppb level elements such as As, Se and Pb are detected as well as major elements such as Si, Ca and Fe. Measured powder was retrieved after measurement.
The new, next generation benchtop total reflection X-ray fluorescence (TXRF) spectrometer
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers