With a traditional direct excitation XRF spectrometer, it is difficult to obtain high signal-to-noise spectra for elements like palladium (Pd) or cadmium (Cd) due to high background intensities in the K-line energy range (20-24 keV) even with X-ray filter. However, with the TXRF technique, it is possible to reduce the background present in the measured spectra dramatically. The sample, containing 1 ppm of Cd, was prepared by pipetting 10 μL of aqueous solution onto a glass substrate followed by drying. The spectrum of the TXRF measurement has a clear peak of Cd-Ka on the lower background. In general Cd-La with the excitation by Mo-K line, it is known to be susceptible to overlap of other elements. On the contrary, Cd-Ka can be measured without overlap of other elements in this instrument.
The new, next generation benchtop total reflection X-ray fluorescence (TXRF) spectrometer
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers