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What is X-ray Fluorescence (XRF)?

Measure almost any element in almost any matrix

X-ray fluorescence (XRF) provides one of the simplest, most accurate and most economic analytical methods for the determination of elemental composition of many types of materials. Indispensable to both R&D and quality assurance (QA) functions, our advanced and unique WDXRF products are routinely used to analyze products from cement to plastics and from metals to food to semiconductor wafers. Rigaku offerings range from high power, high-performance wavelength dispersive WDXRF systems, for the most demanding applications, to a complete line of benchtop EDXRF and WDXRF systems.

X-ray Fluorescence

Theory of X-ray fluorescence

In XRF, an electron can be ejected from its atomic orbital by the absorption of a light wave (photon) of sufficient energy. The energy of the photon (hν) must be greater than the energy with which the electron is bound to the nucleus of the atom.

 

When an inner orbital electron is ejected from an atom (middle image), an electron from a higher energy level orbital will be transferred to the lower energy level orbital. During this transition a photon maybe emitted from the atom (far rightimage).

XRF Schematic

This fluorescent light is called the characteristic X-ray of the element. The energy of the emitted photon will be equal to the difference in energies between the two orbitals occupied by the electron making the transition. Because the energy difference between two specific orbital shells, in a given element, is always the same (i.e. characteristic of a particular element), the photon emitted when an electron moves between these two levels, will always have the same energy. Therefore, by determining the energy (wavelength) of the X-ray light (photon) emitted by a particular element, it is possible to determine the identity of that element.

Products | Application notes

Rigaku recommends the following products

OXIDE-FB-PAK

Pre-calibrated package to quantitatively analyze a wide range of oxides in minerals and geological samples

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GEO-TRACE-PAK

Pre-calibrated package for quantitatively analyzing tracing elements and major oxides in minerals and geological samples

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OIL-MULTI-PAK

Pre-calibrated package for multi-element analysis of lubricants using liquid analysis

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TXRF 3760

TXRF spectrometer for wafer surface contamination for up to 200 mm wafers

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TXRF 310Fab

TXRF spectrometer for wafer surface contamination for up to 300 mm wafers

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TXRF 310Fab-R

Advanced tool for ultratrace elemental contamination analysis

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TXRF-V310

TXRF-VPD spectrometer for wafer surface contamination for up to 300 mm wafers

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ZSX Primus IV

High-power, tube-above, sequential WDXRF spectrometer with ZSX Guidance expert system software

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ZSX Primus III NEXT

Affordable, high-end, tube-above Industrial WDXRF for the analysis of solid samples

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ZSX Primus IV𝒾

High-power, tube-below, sequential WDXRF spectrometer with new ZSX Guidance expert system software

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Supermini200

Benchtop tube below sequential WDXRF spectrometer analyzes O through U in solids, liquids and powders

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Simultix 15

High-throughput, tube-above, multi-channel simultaneous WDXRF spectrometer analyzes Be through U

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ZSX Primus400

WDXRF spectrometer designed to handle very large and/or heavy samples

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Micro-Z ULS

WDXRF ultralow sulfur analyzer for method ASTM D2622

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XES Chimica

X-ray emission spectrometer that enables quantitative analysis of the chemical states of elements

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NEX CG II Series

High-performance indirect excitation EDXRF for complex applications with trace elements and variable base matrices

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NEX DE Series

High-power 60 kV EDXRF systems delivering speed, precision, and small spot measurements

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NEX QC II Series

Compact, intuitive benchtop EDXRF for everyday elemental testing

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Rigaku Automation Interface

Open Python orchestration interface for seamless integration and safe testing

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LabLinc Studio

Close Your AI discovery loop with LabLinc Studio

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Application Notes

The following application notes are relevant to this technique

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