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WDXRF Wafer & Large Sample Mapping at a Lab Tool Price 

Looking for a large sample WDXRF for your lab use? Don't want to pay the premium for the fab and SEMI requirements?
Consider Rigaku ZSX Primus 400 optimized for non-fab, non-cleanroom use.

Request information today!

Tell us what your research and analysis goals are, and we will configure a system to meet your needs.

Laboratory sequential WDXRF for large samples: ZSX Primus 400

Rigaku ZSX Primus 400 is the only commercially available sequential wavelength dispersive X-ray fluorescent (WDXRF) spectrometer in the market designed to accommodate and map large samples, such as:

  • Semiconductor wafers
  • Sputtering targets
  • Solar panels.

The ZSX Primus 400 is optimized for laboratory use, eliminating the expensive fab and semiconductor industry requirements. The ZSX Primus 400 has everything you need and nothing you don't need.

  • Large sample elemental mapping accommodating samples up to 400 mm diameter, 50 mm thick, and 30 kg mass.
  • Right-sized and cost-effective for lab use without the unnecessary and expensive fab options.
  • Ideal for multilayer thickness analysis accommodating up to 10 layers ranging from nano to micrometers in thickness.
  • WDXRF for the flexibility to scan from boron (B) to uranium (U).
  • WDXRF for the analysis of complex samples with a higher resolution than EDXRF.
ZSX Primus 400 with monitor (open)

What can the ZSX Primus 400 analyze?
wafers
Wafers

12" wafers can be fully mapped without breaking them. The thickness of thin films, ranging from nanometers to microns, can be analyzed up to ten layers.

sputtering targets - donotuse
Sputtering targets

Sputtering targets up to 400 mm in diameter, 50 mm thick, and 30 kg can be fully mapped.

solar panels
Solar panels

Solar panels up to 400 mm in diameter can be fully mapped without breaking them.

Why choose the ZSX Primus 400?

Right-sized and cost-effective solution

The ZSX Primus 400 has everything you need and nothing you don't need. It is optimized for laboratory use, so you don't need to pay for the expensive fab and semiconductor industry requirements.

Made for non-destructive analysis of large samples

Don't break your samples for elemental analysis anymore. The ZSX Primus 400 can map anything from 12-inch wafers and solar panels to 30 kg sputtering targets. We make custom holders to accommodate irregularly shaped samples.
various samples on Primus 400

I’m interested. What should I do now?

Fill out the form and we will reach out to you to understand your needs and see if the Primus 400 is a good fit. If it is, we will analyze your samples to demonstrate its capability and you can be assured that it will do the job for you.
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