Qualana

Micro-XRF spectrometer for precise, reliable data

Qualana helps reduce the uncertainty often encountered in micro-area analysis. By accurately targeting the intended measurement point and linking positional information with analytical results, it helps users proceed with greater confidence based on the results obtained.Qualana also reduces the need for repeat measurements or additional verification by other techniques, supporting faster root-cause analysis.

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Qualana Overview

Measure the intended micro-area directly

In micro-area elemental analysis, even a slight offset between the optical observation point and the X-ray irradiation point can affect the conclusion. Qualana's Vetical3-Axis Targeting is a proprietary optical system that vertically aligns the low-magnification camera, high-magnification camera, and X-ray source. Combined with high-precision stage control, it accurately guides the observed location to the X-ray irradiation point. This reduces misjudgments caused by positional offsets and minimizes realignment work, helping identify root causes more quickly.

Traceable workflow for easier explanation and verification

Rather than measuring the entire sample in detail from the start, Qualana lets users first grasp the overall picture through large-area mapping and then examine only the necessary locations in detail. This approach reduces measurement time while lowering the risk of overlooking important features, helping users reach the data needed for decision-making. Because the measurement workflow can be traced, the effort required for explanation and verification is reduced.

Qualana Features

Measure the intended micro-area directly: minimized offset. Reduced uncertainty.
Analyze exactly the area you intend with greater confidence. Unlike conventional systems, where differences between the optical viewing angle and X-ray beam can cause the analysis location to shift as sample height varies, Qualana's Vertical3-Axis Targeting optical system aligns the camera and X-ray source on the same vertical axis.

Combined with high-precision stage control, this minimizes the difference between the area you select and the area actually analyzed by X-rays.
Selectable spot size to suit your application:
Spot Focus Control allows the spot size to be selected from 20 to 200 μm, enabling both large-area mapping and detailed spot analysis with a single instrument.

Quantitative analysis using Fundamental Parameter (FP) method is supported for all spot sizes —20, 50, 100, 150, and 200 μm— providing reliable results across diverse applications.
Large-area mapping for large or tall samples
Qualana accommodates samples up to 220 (W) × 220 (D) × 120 (H) mm and performs full XY mapping over an area of up to 200 × 200 mm (equivalent to an 8-inch wafer) without repositioning the sample.

Automatic height adjustment and collision-avoidance sensors enable stable measurements even for tall samples.
Standardless thin-film analysis
Qualana incorporates Rigaku's Fundamental Parameters (FP) technology, built on more than 50 years of XRF expertise. With a built-in sensitivity library essential for quantitative analysis, Qualana enables evaluation of thin-film thickness and composition without the need for reference standards.

Because analysis can be performed directly at the observed location without damaging the sample, Qualana supports efficient thin-film evaluation for research, development, and failure analysis.
A measurement workflow that connects large-area mapping to spot analysis
Qualana software supports a continuous analysis workflow: first grasp the overall picture through large-area mapping, then examine only the necessary locations in detail.

Because mapping results and follow-up spot analysis data are linked and stored together, users can later review which results prompted additional measurements and why. This reduces the effort required to explain and verify data. .
Intuitive, ready-to-use software
Qualana software is intuitive software designed to help operators become proficient quickly. A single, streamlined four-step workflow covers sample loading, imaging, parameter setup, and measurement.

Qualana Specifications

Product name Qualana
Technique Micro-XRF
Benefit Composition and film thickness analysis of micro-area, elemental mapping analysis
Attributes Air-cooled microfocus X-ray tube, policapillary, silicon drift detector (SDD)
Options Printer
Computer PC, MS Windows OS, Qualana Controller software, Qualana Analyzer software
Demensions 1040 (W) x 1315 (H) x 810 (D) mm
Weight 560 kg
Power requirements Instrument: Single-phase 200-240 V, 50/60 Hz, 20 A

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