Qualana
Micro-XRF spectrometer for precise, reliable data
Qualana helps reduce the uncertainty often encountered in micro-area analysis. By accurately targeting the intended measurement point and linking positional information with analytical results, it helps users proceed with greater confidence based on the results obtained.Qualana also reduces the need for repeat measurements or additional verification by other techniques, supporting faster root-cause analysis.
Qualana Overview
Measure the intended micro-area directly
In micro-area elemental analysis, even a slight offset between the optical observation point and the X-ray irradiation point can affect the conclusion. Qualana's Vetical3-Axis Targeting is a proprietary optical system that vertically aligns the low-magnification camera, high-magnification camera, and X-ray source. Combined with high-precision stage control, it accurately guides the observed location to the X-ray irradiation point. This reduces misjudgments caused by positional offsets and minimizes realignment work, helping identify root causes more quickly.
Traceable workflow for easier explanation and verification
Rather than measuring the entire sample in detail from the start, Qualana lets users first grasp the overall picture through large-area mapping and then examine only the necessary locations in detail. This approach reduces measurement time while lowering the risk of overlooking important features, helping users reach the data needed for decision-making. Because the measurement workflow can be traced, the effort required for explanation and verification is reduced.
Qualana Features
Combined with high-precision stage control, this minimizes the difference between the area you select and the area actually analyzed by X-rays.
Quantitative analysis using Fundamental Parameter (FP) method is supported for all spot sizes —20, 50, 100, 150, and 200 μm— providing reliable results across diverse applications.
Automatic height adjustment and collision-avoidance sensors enable stable measurements even for tall samples.
Because analysis can be performed directly at the observed location without damaging the sample, Qualana supports efficient thin-film evaluation for research, development, and failure analysis.
Because mapping results and follow-up spot analysis data are linked and stored together, users can later review which results prompted additional measurements and why. This reduces the effort required to explain and verify data. .
Qualana Specifications
| Product name | Qualana | |
|---|---|---|
| Technique | Micro-XRF | |
| Benefit | Composition and film thickness analysis of micro-area, elemental mapping analysis | |
| Attributes | Air-cooled microfocus X-ray tube, policapillary, silicon drift detector (SDD) | |
| Options | Printer | |
| Computer | PC, MS Windows OS, Qualana Controller software, Qualana Analyzer software | |
| Demensions | 1040 (W) x 1315 (H) x 810 (D) mm | |
| Weight | 560 kg | |
| Power requirements | Instrument: Single-phase 200-240 V, 50/60 Hz, 20 A | |
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