Rigaku Launches Qualana, a Micro-XRF Spectrometer

Rigaku Corporation (Headquarters: Akishima City, Tokyo; President and CEO: Jun Kawakami; hereinafter “Rigaku”), a group company of Rigaku Holdings and a global solutions partner for X-ray analytical systems, has launched Qualana, a micro-XRF spectrometer capable of elemental analysis in areas as small as 20 µm.

As electronic devices, batteries, and advanced materials become increasingly sophisticated and miniaturized, there is a growing need to evaluate localized elemental composition, film thickness distribution, and foreign particles in small components and materials. Micro-area elemental analysis presents challenges, including reduced signal intensity due to X-ray collimation and misalignment between the observation point and the X-ray irradiation point caused by irregularities in the sample surface. Qualana employs an optical system that irradiates and observes the sample directly from above, together with a high-precision stage designed for micro-area analysis. This configuration enables accurate acquisition of elemental information from the targeted location.

Reliable X-ray irradiation at the targeted location

The system employs an optical configuration in which both the X-ray lens and the sample observation camera are positioned directly above the sample. By irradiating and imaging the sample from the same vertical direction, the system minimizes misalignment between the observation point and the X-ray irradiation point caused by variations in sample height or surface irregularities, enabling precise analysis of the desired location.

High-precision analysis of areas as small as 20 µm

X-rays can be directed at the sample with a minimum spot size of 20 µm to analyze the elemental composition of micro-areas. This enables users to obtain elemental information from localized areas—such as small features in electronic components, foreign particles, and discolored areas—that are difficult to evaluate with a larger irradiation spot.

Efficient evaluation of large areas through wide-area mapping

Large-area mapping measurements can be performed over areas of up to 200 mm × 200 mm. By switching the irradiation spot size, users can choose between high-resolution measurements of micro-areas and efficient measurements covering a wide area. In addition to evaluating elemental distributions over a wide area, this feature supports the detection of microscopic foreign particles.

FP Analysis for thin films

Composition and film thickness can be quantified using Rigaku’s long-established FP method. The Multilayer Film FP function allows users to flexibly configure FP models for a wide range of thin-film samples.