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semiconductor_metrology_tools

Semiconductor Metrology Tools

X-ray metrology solutions from lab to fab

crystallography

Crystallography

X-ray and electron diffraction for crystallography

scattering

X-ray Diffraction & Scattering

X-ray diffractometers for crystalline materials analysis

xrf_spectrometers

XRF Spectrometers

X-ray fluorescence spectrometers for elemental analysis

imaging__nondestructive__testing

Imaging & Non-destructive Testing

Computed tomography and radiography systems for X-ray imaging

thermal__analysis

Thermal Analysis

Thermal and evolved gas analysis instruments for materials characterization

handheld_raman

Handheld Raman spectrometers for materials identification

components

X-ray sources, detectors, optics, magnetic fluid feedthroughs, and high-voltage supplies

process_control

Process Control

In-line monitoring systems

semiconductor_metrology_tools

Semiconductor Metrology Tools

X-ray metrology solutions from lab to fab

rsmd_wdxrf

Flexible elemental analysis for thin films

xrr_edxrf_optical

XRR, EDXRF & Optical

X-ray and hybrid metrology solutions for blanket and patterned wafers

rsmd_txrf

Wafer surface contamination metrology

rsmd_hrxrd

X-ray metrology for epitaxial films

xrt

Non-destructive dislocation imaging

scattering

X-ray diffraction for crystallographic orientation of wafers and ingots

cdsaxs

X-ray critical dimension metrology

crystallography

Crystallography

X-ray and electron diffractometers and consumables for crystallography

xrd

X-ray Diffraction

X-ray diffractometers for protein and small molecule crystallography

$electron_diffraction$

Electron Diffraction

Electron diffractometer for protein and small molecule crystallography

reagents

Formulations and other consumables for protein crystallization

scattering

X-ray Diffraction & Scattering

X-ray diffraction and scattering analyses for atomic level materials characterization

xrd

X-ray diffractometers for polycrystalline materials characterization

saxs

Small angle X-ray scattering for nanoscale size, shape, and morphology analyses

stress_analysis

Stress Analysis

X-ray diffractometers for non-destructive residual stress analysis

xrf_spectrometers

XRF Spectrometers

X-ray fluorescence spectrometers for elemental analysis

edxrf

Energy dispersive X-ray fluorescence spectrometers for elemental analysis

wdxrf_spectrometers

Wavelength dispersive X-ray fluorescence spectrometers for elemental analysis

txrf

Total reflection X-ray fluorescence spectrometers for surface and trace phase analysis

imaging__nondestructive__testing

Imaging & Non-destructive Testing

Non-destructive imaging analysis by X-rays

xray_computer_tomography

X-ray Computed Tomography

Research grade industrial X-ray computed tomography for non-destructive 3D imaging

ndt_products

Radiography instruments for non-destructive testing

molecular_imaging

Molecular Imaging

Multimodal molecular imaging systems for pre-clinical studies

thermal__analysis

All thermal analysis equipment

Thermal analysis equipment for elucidating the thermal behavior of materials

dsc

Devices that detect changes in thermal energy that occur within a sample when it is heated or cooled

sta

Material analysis equipment that detects weight changes and thermal energy changes occurring with a sample

tma

Analytical devices that detect changes in the shape of a sample when the sample is heated or cooled

evolved_gas_analysis_new

Evolved Gas Analysis

Evolved gas analysis instruments for materials characterization

general_thermal_analysis

Other thermal analysis equipment

Other thermal analysis attachments

thermal_analysis_software

Measurement and analysis software for thermal analysis and evolved gas

components

X-ray sources, detectors, optics, magnetic fluid feedthroughs, and high-voltage supplies

xray_sources

High-brilliance X-ray sources

optics

X-ray and ultraviolet multilayer and crystalline optics

detectors

Research-grade X-ray detectors

vacuum_feedthroughs

Magnetic Fluid Feedthroughs

Magnetic fluid feedthrough components

nsi_x-ray_sources

Miniature X-ray sources and high-voltage systems

Enabling small and powerful portable and handheld systems

All Industries

all_applications

Overview of all industries we serve

nanotech_material_science

Nanotechnology & Materials Sciences

Structure analysis from atomic to micron scale

semiconductor_metrology_tools

Semiconductor & Electronic Devices

Metrology tools from lab to fab

biotechnology

Biotechnology & Life Sciences

Atomic, nano- to micron-scale organic materials characterization

environment__energy

Environment & Energy

Mineralogical and elemental analysis for industrial and environmental needs

construction

Mineralogical and elemental analysis for construction materials

safety_security

Safety & Security

Tools for chemical threat identification and forensics

academic_reserach

Academic Research

Analytical instruments for teaching and synchrotron beamline components

nanotech_material_science

Nanotechnology & Materials Sciences

Structure analysis from atomic to micron scale

material_science_research

Materials Science Research

Crystalline structure, nanoscale morphology, and elemental analyses for materials science

nanotechnology

Atomic to nanoscale materials characterization for nanotechnology research

advanced__new_materials

Advanced & New Materials

State-of-the-art analysis techniques developed for advanced and new materials research

chemistry

A wide range of analysis tools for solutions to study liquids, powders, solids, films, or single crystals

coatings_thin_film

Coatings & Thin films

Elemental, crystallographic, and structural characterization tools for coatings and thin films

metal_alloys

Metals & Alloys

Elemental, crystalline phase, and texture analysis for metals and alloys

plastics_polymers

Polymers, Plastics

Analysis tools for additive concentration, percent crystallinity calculation, and advanced materials characterization

composites

High-resolution 3D imaging for characterization of fillers, fibers, pores, and cracks in composites

ceramics

Crystalline phase and elemental analyses for ceramics characterization

semiconductor_metrology_tools

Semiconductor & Electronic Devices

Metrology tools from lab to fab

semiconductor

X-ray Metrology Solutions

electronics

Advanced Analytical Technology in Electronics Research & Quality Control

biotechnology

Biotechnology & Life Sciences

Atomic, nano- to micron-scale organic materials characterization

pharmaceuticals

Pharmaceuticals

Crystalline structure and elemental analyses from drug discovery to process control

life_science_research

Life Science Researches

Protein and small molecule crystallography and various imaging instruments for life science research

biotechnology

Crystalline structure, nanoscale structure, and elemental analyses for engineered biological materials

food_ingredients

Food & Food Ingredients

Elemental analysis and foreign object screening for food and food ingredients safety

cosmetics

Crystalline structure and elemental analyses for R&D, QC, and materials identification for anti-counterfeit prevention

environment__energy

Environment & Energy

Mineralogical and elemental analysis for industrial and environmental needs

battery

Crystalline structure characterization of electrode for R&D and non-destructive imaging for failure analysis

mining_refining

Mining & Refining

Elemental and mineralogical analysis for every stage of R&D and process control

environment__pollution

Environment & Pollution

Heavy metal analysis for contamination monitoring and recycling materials classification

geology__minerals

Geology & Minerals

Mineralogical and elemental analysis for in-depth study of geological specimens, and natural and artificial minerals

petrochemical

Petroleum & Petrochemicals

Mineralogical and elemental analysis for exploration, production, and distribution process

photovoltaics

Crystalline and elemental analysis for thin-film photovoltaic materials

construction

Mineralogical and elemental analysis for construction materials

cement

Elemental and mineralogical analysis from R&D to process control

asphalt

Elemental and mineralogical analysis for developing and formulating asphalt mixes

safety_security

Safety & Security

Tools for chemical threat identification and forensics

drug_hazmat_explosive

Drug, Hazmat & Explosive Screening

Handheld devices for chemical threat identification

forensics

Elemental and mineralogical analyses for forensics

academic_reserach

Academic Research

Analytical instruments for teaching and synchrotron beamline components

education

Affordable and simple analytical instruments for teaching

synchrotron

X-ray detectors and optics for synchrotron beamlines

All Resources

all_resources

Educational events, articles, publications, and other resources

events_webinars

Events & Webinars Calendar

Upcoming events and webinars

newsletters

Rigaku newsletters for materials science, crystallography, X-ray CT, and semiconductor metrology

technique_library

Technique Library

Learn more about techniques for your analysis needs

application__library

Application Library

Find application examples in your field

rigaku_journal

Browse and search Rigaku Journal articles

blogs

Browse Rigaku blogs

on_demand_webinars

On-demand Webinars

Watch on-demand webinars to learn new techniques and industry trends

publications_library

Publication Library

See how our products are used in published journal articles

eBook

Download industry-related application eBooks

xray_forum

Rigaku Oxford Diffraction Forum

Find discussions about software, general crystallography issues and more

service_support

Service & Support

Professional and high quality service and support

contact_service

Contact Service

Contact our service help desk

customer_training

Customer Training

Customer training schedule and e-learning courses

about_us

See an overview of company information

contact_us

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Find a Distributor

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divisions

Rigaku Divisions

Our business divisions and their locations

news_events

News & Press Releases

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Who we are and our history

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Rigaku is working to make a better and more sustainable world

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Semiconductor Metrology Tools

Crystallography

X-ray Diffraction & Scattering

XRF Spectrometers

Imaging & Non-destructive Testing

Thermal Analysis

Components

Nanotechnology & Materials Sciences

Semiconductor & Electronic Devices

Biotechnology & Life Sciences

Environment & Energy

Construction

Safety & Security

Academic Research

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The Winter 2026 issue (Vol. 41 No. 1) of the Rigaku Journal is now available

The new issue contains technical articles related to CT imaging of polyesters, profile analysis in powder diffraction using AI tools, stress analysis of crystalline polymers, the use of total X-ray scattering and new product info about DicifferX Microarea Edition, TFXRD for thin film analysis of large-diameter wafers, and simultaneous thermal TG and DSC analysis.