Application Note B-XRD2035: III-V 族氮化物薄膜的倾斜幅度和扭曲幅度的 样品面内分布评估
导言
作为对环境影响小的紫外线源，深紫外LED有望取代汞灯。近年来特别是其杀菌功能受到了极大的关注，有望早日普及使用。为了提高发光效率和延长使用寿命，需要提高AlGaN发光层基层AlN层的质量。而薄膜中可能存在部分晶体取向有明显变化的成分，常常使用摇摆曲线测量评估AlN层的结晶性。本测量示例中，通过高速倒易空间图检测晶体取向明显紊乱的成分。
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