Using Rigaku's SmartLab multipurpose diffractometer to measure in-plane diffraction, the crystal structure, lattice constants and crystallite size of a polycrystalline thin film can be found. Nitrogen is added to a recoding layer (GeSbTe 20 nm) employed in various recording media, such as DVD, and the changes in crystallite size, lattice distortion and lattice constants are measured. The measurement results are shown below.
|
|
| Amount of Nitrogen (at%) | 0 | 1.5 | 3.0 | 4.5 | 6.0 |
|---|---|---|---|---|---|
| Crystallite Size (Å) | 278 | 348 | 242 | 195 | 154 |
| TEM Observation | 200 - 400 | 100 - 250 | 50 - 150 | ||
| Lattice Distortion (%) | 0.20 | 0.05 | 0.02 | - | - |
| Lattice Constant (Å) | 6.034 | 6.049 | 6.055 | 6.059 | 6.060 |
As shown in the figure and table above, with this method, the change of crystallinity and its structure can be evaluated in detail using the actual media. The crystallite sizes agree well with the results determined by TEM observations.